Patterning disorder in monolayer resists for the fabrication of sub-100- nm structures in silver, gold, silicon, and aluminum

Journal of the American Chemical Society

Volumn 121, Issue 36, 1999, Pages 8356-8365

  Black, Andrew J ^a   Paul, Kateri E ^a   Aizenberg, Joanna ^b   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; GOLD; NANOPARTICLE; SILICON; SILVER;

ARTICLE; CHEMICAL REACTION; CHEMICAL STRUCTURE; ELECTRON BEAM; REACTION ANALYSIS;

EID: 0033568465     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja990858s     Document Type: Article

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