Controlling local disorder in self-assembled monolayers by patterning the topography of their metallic supports

Nature

Volumn 394, Issue 6696, 1998, Pages 868-871

  Aizenberg, Joanna ^a   Black, Andrew J ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; ELECTRONICS; PRIORITY JOURNAL; SEMICONDUCTOR; STRUCTURE ANALYSIS;

EID: 0032572756     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/29730     Document Type: Article

References (26)

1. Moreau, W. M. Semiconductor Lithography: Principles and Materials (Plenum, New York, 1988).
2. Smith, H. I. A Review of Submicron Lithography. Superlat. Microstruct. 2, 129-133 (1986).
3. Cerrina, F. & Marrian, C. A path to nanolithography. MRS Bull. 12, 56-60 (1996).
4. Kim, E., Xia, Y. & Whitesides, G. M. Polymer microstructures formed by moulding in capillaries. Nature 376, 581-584 (1995).
5. Berggren, K. K. et al. Microlithography by using neutral metastable atoms and self-assembled monolayers. Science 269, 1255-1257 (1995).
6. Chen, C. S., Mrksich, M., Huang, S., Whitesides, G. M. & Ingber, D. E. Geometric control of cell life and death. Science 276, 1425-1428 (1997).
7. Bunker, B. C. et at. Ceramic thin-film formation on functionalized interfaces through biomimetic processing. Science 264, 48-55 (1994).
8. Hu, J. et al. Using soft lithography to fabricate GaAs/AlGaAs heterostructure field effect transistors. Appl. Phys. Lett. 71, 2020-2022 (1997).
9. Ulman, A. Introduction to Thin Organic Films: From Langmuir-Blodgett to Self-Assembly (Academic, Boston, 1991).
10. Nuzzo, R. G., Dubois, L. H. & Allara, D. L. Fundamental studies of microscopic wetting on organic surfaces. 1. Formation and structural characterization of a self-consistent series of polyfunctional organic monolayers. J. Am. Chem. Soc. 112, 558-569 (1990).
11. Laibinis, P. E. et al. A comparison of the structures and wetting properties of self-assembled monolayers of n-alkanethiols on the coinage metal surfaces Cu, Ag, Au. J. Am. Chem. Soc. 113, 7152-7167 (1991).
12. Dulcey, C. S. et al. Deep UV photochemistry of chemisorbed monolayers: patterned coplanar molecular assemblies. Science 252, 551-554 (1991).
13. Tiberio, R. C. et al. Self-assembled monolayer electron beam resist on GaAs. Appl. Phys. Let. 62, 476-478 (1993).
14. Kumar, A., Abbott, N. A., Kim, E., Biebuyck, H. A. & Whitesides, G. M. Patterned self-assembled monolayers and meso-scale phenomena. Acc. Chem. Res. 28, 219-226 (1995).
15. Xia, Y., Zhao, X. M. & Whitesides, G. M. Pattern transfer: self-assembled monolayers as ultrathin resists. Microelectr. Eng. 32, 255-268 (1996).
16. Larsen, N. B., Biebuyck, H., Delamarche, E. & Michel, B. Order in microcontact printed self-assembled monolayers. J. Am. Chem. Soc. 119, 3017-3026 (1997).
17. Abbott, N. L., Folkers, J. P. & Whitesides, G. M. Manipulation of the wettability of surfaces on the 0.1-to 1-micrometer scale through micromachining and molecular self-assembly. Science 257, 1380-1382 (1992).
18. López, G. P., Biebuyck, H. A., Frisbie, C. D. & Whitesides, G. M. Imaging of features on surfaces by condensation figures. Science 260, 647-649 (1993).
19. Kumar, A. & Whitesides, G. M. Patterned condensation figures as optical diffraction gratings. Science 263, 60-62 (1994).
20. Landau, E. M., Levanon, M., Leiserowitz, L., Lahav, M. & Sagiv, I. Transfer of structural information from Langmuir monolayers to three-dimensional growing crystals. Nature 318, 353-356 (1985).
21. Stupp, S. I. & Braun, P. V. Molecular manipulation of microstructures: biomaterials, ceramics, and semiconductors. Science 277, 1242-1248 (1997).
22. Heywood, B. R. & Mann, S. Template-directed nucleation and growth of inorganic materials. Adv. Mater. 6, 9-20 (1994).
23. Berman, A. et al. Total alignment of calcite at acidic polydiacetylene films: cooperativity at the organic-inorganic interface. Science 269, 515-518 (1995).
24. Weiner, S. & Addadi, L. Design strategies in mineralized biological materials. J. Mater. Chem. 7, 689-702 (1997).
25. Mann, S. & Ozin, G. A. Synthesis of inorganic materials with complex form. Nature 382, 313-318 (1996).
26. Zhao, X.-M., Wilbur, J. L. & Whitesides, G. M. Using two-stage chemical amplification to determine the density of defects in self-assembled monolayers of alkanethiolates on gold. Langmuir 12, 3257-3264 (1996).