Reading and writing with electron beams

Physics Today

Volumn 50, Issue 10, 1997, Pages 56-61

  Murray Gibson, J ^a,b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b Univ's Frederick Seitz Mat Res L   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; ELECTRON MICROSCOPES; ELECTRON OPTICS; FOURIER OPTICS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE;

ATOMIC ARRANGEMENTS; COMPUTER GENERATED IMAGES; MICROSCOPE IMAGES; SEMICONDUCTOR CHIPS;

ELECTRON BEAMS;

EID: 0031259224     PISSN: 00319228     EISSN: None     Source Type: Trade Journal    
DOI: 10.1063/1.881964     Document Type: Article

References (6)

1. D. B. Williams, C. Barry Carter, Transmission Electron Microscopy, Plenum, New York (1996).
2. D. Hofmann, F. Ernst, Ultramicroscopy 53, 205 (1994).
3. J. Zach, M. Haider, Optik 98, 112 (1995).
4. N. D. Browning, J. Yuan, L. M. Brown, Physica C 202, 12 (1992).
5. J. A. Liddle et al., Jpn. J. Appl. Phys. 34, 6663 (1995).
6. J. M. Gibson, M. M. J. Treacy, Phys. Rev. Lett. 78, 1074 (1997).