Applications of focused ion beam machining to the characterization of carbide, nitride and oxide films

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 369-374

  Presser, N ^a   Hilton, M R ^a  

^a AEROSPACE CORPORATION   (United States)

Author keywords

Focused ion beam; Ion milling; Multilayer films

Indexed keywords

ION BEAMS; OPTICAL FILMS; PROTECTIVE COATINGS; TOOL STEEL;

FOCUSED ION BEAMS; ION MILLING;

MULTILAYERS;

EID: 0031249745     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00583-X     Document Type: Article

References (5)

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2. (a) R. Virus and D. Spratt, Texas Inst Tech J., 11 (1994) 28.
3. (b) J. Melngailis et al., J. Vac. Sci. Technol., B4 (1986) 176.
4. T. Ishitani et al., J. Electron Microsc., 44 (1995) 110.
5. J. Orloff, Rev. Sci. Instrum., 64 (1993) 1105, for a discussion of differences in the optics of field emission systems.