Chemically amplified electron-beam photoresists

Chemistry of Materials

Volumn 8, Issue 2, 1996, Pages 376-381

  Crivello, James V ^a   Shim, Sang Yeon ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001704484     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm950199s     Document Type: Article

References (19)

1. Thompson, L. F.; Willson, C G.; Bowden, M. J. Introduction to Microlithography; ACS Symp. Ser. 219, American Chemical Society: Washington, DC, 1983; p 122.
2. Sheats, J. R. Solid State Technol. 1989, 32 (6), 79.
3. Thompson, L. F.; Willson, C G. ACS Symp Ser. 1983, 279.
4. (a) Tessier, T. G.; Fréchet, J. M. J., Willson, C. G. Materials for Microlithography; ACS Symp. Ser. 266; American Chemical Society: Washington, DC, 1984; p 151.
5. (b) Willson, C. G.; Ito, H. J. Electrochem. Soc. 1986, 133, 181.
6. Houlihan, F. M.; Chin, E., Nalamasu, O.; Kometani, J. M. Proc. Polym. Mater. Sci. Eng. 1992, 66, 38.
7. Crivello, J. V.; Lee, J. L ; Conlon, D. A. Makromol. Chem., Macramol. Symp. 1988, 13/14, 145.
8. Houlihan, F. M.; Shugard, A.; Gooden, R.; Reichmanis, E. Proc. SPIE 1988, 620, 67.
9. Houlihan, F. M ; Shugard, A., Gooden, R.; Reichmanis, E. Macromolecules 1988, 21, 2001.
10. Houlihan, F M.; Shugard, A ; Gooden, R., Reichmanis, E. Kometani, J. M.; Bachman, B. J.; Thompson, L. Macromolecules 1990, 23, 145
11. Ito, H. Polym. Prepr. 1990, 31(2), 375.
12. Novembre, A. E.; Tai, W. W.; Kometani, J. M.; Hanson, J. E., Nalamasu, O.; Taylor, G. N.; Reichmanis, E.; Thompson, C. F. Proc. SPIE 1991, 1466, 89.
13. Crivello, J. V.; Shim, S -Y., J. Polym. Sci., Polym. Chem. Ed. 1995, 33, 513.
14. Crivello, J. V.; Shim, S.-Y., Chem. Mater. 1994, 6, 2167.
15. O'Brien, M. J ; Crivello, J. V. Proc. SPIE, 1988, 920, 42.
16. Singh, A.; Silverman, J. Radiation Processing of Polymers. Hanser Publishers: Munich, 1992; p 1.
17. Crivello, J. V.; Fan, M.; Bi, D. J. Appl. Polym. Sci. 1992, 44, 9
18. Crivello, J V.; Jo, K. D. J. Polym. Sci., Polym Chem. Ed. 1993, 31, 2143.
19. Sundell, P-E.; Jönsson, S.; Hult, A. Polym Prepr. 1990, 31 (2), 373.