Self-assembled fluorocarbon films for enhanced stiction reduction

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1399-1402

  Srinivasan, Uthara ^a   Houston, Michael R ^a   Howe, Roger T ^a   Maboudian, Roya ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CHLORINE COMPOUNDS; FLUOROCARBONS; HEAT TREATMENT; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; STICTION;

FLUOROCARBON FILM; SELF ASSEMBLED MONOLAYER; STICTION REDUCTION;

COATINGS;

EID: 0030708042     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)