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Volumn 2, Issue , 1994, Pages 1241-1244
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Surface micromachined electrostatic ultrasonic air transducer
a
a
SIEMENS AG
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC ARRAYS;
CAPACITORS;
ELECTRODES;
ELECTROSTATICS;
EQUATIONS OF MOTION;
FABRICATION;
MATHEMATICAL MODELS;
MEMBRANES;
MICROMACHINING;
PLATE METAL;
RESONANCE;
SILICON;
BROADBAND ULTRASONIC AIR TRANSDUCER;
ELECTRODE SPACING;
ELECTRONICALLY SCANNED SYSTEMS;
ELECTROSTATIC TRANSDUCER;
OPERATION THEORY;
SILICON PROCESSING TECHNIQUE;
SILICON SURFACE MICROMACHINING;
TRANSDUCER ARRAYS;
ULTRASONIC TRANSDUCERS;
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EID: 0028739970
PISSN: 10510117
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (196)
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References (10)
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