Micromachined ultrasonic transducers (MUTs)

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1995, Pages 501-504

  Ladabaum, I ^a   Khuri Yakub, B T ^a   Spoliansky, D ^a   Haller, M I ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SIGNAL PROCESSING; AIR; CAPACITANCE; FABRICATION; FREQUENCIES; MATHEMATICAL MODELS; MEMBRANES; MICROMACHINING; NETWORKS (CIRCUITS); OPTIMIZATION; SIGNAL TO NOISE RATIO; SILICON NITRIDE;

CAPACITANCE FLUCTUATIONS; CENTER FREQUENCIES; DISPLACEMENT SENSITIVITY;

ULTRASONIC TRANSDUCERS;

EID: 0029463440     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)