A Silicon Electrostatic Ultrasonic Transducer

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 36, Issue 6, 1989, Pages 620-627

  Suzuki, Kenichiro ^a   Higuchi, Kohei ^a   Tanigawa, Hiroshi ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; INTEGRATED CIRCUITS; ROBOTS, INDUSTRIAL--PROXIMITY SENSORS;

PHASED-ARRAY TRANSDUCERS; SILICON ELECTROSTATIC ULTRASONIC TRANSDUCER; SILICON IC;

ULTRASONIC TRANSDUCERS;

EID: 0024771463     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.39112     Document Type: Article

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