The Design and Characterization of Micromachined Air-Coupled Capacitance Transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 42, Issue 1, 1995, Pages 42-50

  Schindel, David W ^a   Zou, Lichun ^a   Sayer, Michael ^a   Hutchins, David A ^b  

^a QUEEN S UNIVERSITY   (Canada)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; DAMPING; DESIGN; DIELECTRIC FILMS; ETCHING; FABRICATION; INTERFEROMETERS; MICROMACHINING; PLATE METAL; SENSITIVITY ANALYSIS; SILICON; ULTRASONIC WAVES;

AIR COUPLED CAPACITANCE TRANSDUCERS; BACKPLATES; CAPACITANCE TRANSDUCTION; IMPULSE RESPONSE;

ULTRASONIC TRANSDUCERS;

EID: 0029219642     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.368314     Document Type: Article

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