Broadband electrostatic transducers: Modeling and experiments

Journal of the Acoustical Society of America

Volumn 97, Issue 1, 1995, Pages 262-272

  Anderson, Michael J ^a   Hill, James A ^a   Fortunko, Christopher M ^b   Dogan, Numan S ^c   Moore, Russell D ^c  

^a UNIVERSITY OF IDAHO   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; ELECTRIC CONDUCTIVITY; FREQUENCY ANALYSIS; INSTRUMENTATION; MATHEMATICAL ANALYSIS; PRIORITY JOURNAL; RIGIDITY; SIGNAL TRANSDUCTION; SOUND DETECTION; ULTRASOUND TRANSDUCER;

EID: 0028896612     PISSN: 00014966     EISSN: NA     Source Type: Journal    
DOI: 10.1121/1.412310     Document Type: Article

References (35)

1. W. Kuhl, G. R. Schodder, and F. K. Schroder, “Condenser transmitters and microphones with solid dielectric for airborne ultrasonics,” Acustica 4, 520-532 (1954).
2. W. W. Wright, “High frequency electrostatic transducers for use in gases,” IRE Int. Convention Board 10, 95-100 (1962).
3. J. H. Cantrell, J. S. Heyman, W. T. Yost, M. A. Torbett, and M. A. Brea-zeale, “Broadband electrostatic acoustic transducer for ultrasonic measurement in liquids,” Rev. Sci. Instrum. 50, 31-33 (1979).
4. R. Hickling and S. P. Marin, “The use of ultrasonics for gauging and proximity sensing in air,” J. Acoust. Soc. Am. 79, 1151-1160 (1986).
5. T. Tsujimura, T. Yabuta, and T. Morimitsu, “Shape-reconstruction system for three-dimensional objects using an ultrasonic sensor mounted on a manipulator,” Trans. ASME 111, 180-186 (1989).
6. W. S. H. Munro, S. Pomeroy, M. Rafiq, M. D. Williams, M. D. Wybrow, and C. Wykes, “Ultrasonic vehicle guidance transducer,” Ultrasonics 28, 350-354 (1990).
7. T. Otani and Y. Urabe, “A new ultrasonic flaw detection method on smooth surfaces and its applications,” Proceedings of the 1st Symposium of Ultrasonic Electronics, Tokyo, Jpn. J. Appl. Phys. 20, 185-188 (1981).
8. L. Mauritzson, J. liver, G. Benoni, K. Lindstrom, and S. Willner, “Two-dimensional airborne ultrasound real-time array scanner- Applied to screening for scoliosis,” Ultrasound Med. Biol. 17, 519-528 (1991).
9. D. E. Chimenti and C. M. Fortunko, “Characterization of composite prepreg with gas-coupled ultrasonics,” Ultrasonics 32, 261-264 (1994).
10. M. Luukkala and P. Merilainen, “Metal plate testing using airborne ultra-sound,” Ultrasonics 11, 218-221 (1973).
11. M. Luukkala, P. Heikkila, and J. Surakka, “Plate wave resonance-A contactless test method,” Ultrasonics 9, 201-208 (1971).
12. C. M. Fortunko, M. C. Renken, and A. Murray, “Examination of objects made of wood using air-coupled ultrasound,” Proceedings of the IEEE Ultrasonics Symp., pp. 1099-1103 (1990).
13. C. C. Habeger, R. W. Mann, and G. A. Baum, “Ultrasonic plate waves in paper,” Ultrasonics 17, 57-62 (1979).
14. C. M. Fortunko, R. E. Schramm, C. M. Teller, G. M. Light, J. D. Mcco-lskey, W. P. Dube, and M. C. Renken, “Gas-coupled, pulse-echo ultrasonic crack detection and thickness gaging,” in the Proceedings of the 1992 Review of Progress in Quantitative NDE, 1994 (in press).
15. C. M. Fortunko, W. P. Dube, and J. D. Mccolskey, “Gas-coupled acoustic microscopy in the pulse-echo mode,” Proceedings of the IEEE Ultrasonics Symposium, edited by B. R. MCavoy (IEEE, New York, pp. 667-671).
16. F. V. Hunt, Electroacoustics (Harvard University, Cambridge, MA, 1954).
17. Loudspeaker and Headphone Handbook, edited by John Borwick (Butter-worths, London, 1988).
18. K. Matsuzawa, “Condenser microphones with plastic diaphragms for airborne ultrasonics, I,” J. Phys. Soc. Jpn. 13, 1533-1543 (1958).
19. K. Matsuzawa, “Condenser microphones with plastic diaphragms for airborne ultrasonics, II,” J. Phys. Soc. Jpn. 15, 167-174 (1960).
20. J. Merhaut, “A contribution to the theory of electroacoustic transducers based on electrostatic principle,” Acustica 19, 283-292 (1967/68).
21. J. H. Streng, “Sound radiation from circular stretched membranes in free space,” J. Audio Eng. Soc. 37, 107-118 (1989).
22. J. H. Streng, “Calculation of the surface pressure on a vibrating circular stretched membrane in free space,” J. Acoust. Soc. Am. 82, 679-686 (1987).
23. A. J. Zuckerwar, “Theoretical response of condenser microphones,” J. Acoust. Soc. Am. 64, 1278-1285 (1978).
24. J. H. Streng, “Charge movements on the stretched membrane in a circular electrostatic push-pull loudspeaker,” J. Audio Eng. Soc. 38, 331-339 (1990).
25. J. Heitanen, J. Stor-Pellinen, and M. Luukala, “A model for an electrostatic ultrasonic transducer with a grooved backplate,” Meas. Sci. Tech-nol. 3, 1095-1097 (1992).
26. J. M. Hossack, inventor, Ultrasonic Arrays Inc., assignee, “Ultrasonic transducer component and process for making the same and assembly,” US Patent No. 4, 695, 986 (22 September 1987).
27. P. R. Scheeper, A. G. H. van der Donk, W. Olthuis, Bergveld, “Fabrication of silicon condenser microphones using single wafer technology,” J. Mi-croelectromech. Sys. 1, 147-154 (1992).
28. K. Suzuki, K. Higuchi, and H. Tanigawa, “A silicon ultrasonic transducer,” IEEE Trans. Ultrasonics Ferroelectr. Frequency Control 36, 620-627 (1989).
29. D. J. Ijntema and H. A. C. Tilmans, “Static and dynamic aspects of an air-gap capacitor,” Sensors Actuators 35, 121-128 (1992).
30. A. F. Kip, Fundamentals of Electricity and Magnetism (Mcgraw-Hill, New York, 1962); see Secs. 4.7 and 5.5.
31. L. E. Kinsler, A. R. Frey, A. B. Coppens, and J. V. Sanders, Fundamentals of Acoustics, 3rd ed. (Wiley, New York, 1982).
32. H. E. Bass, L. C. Sutherland, J. Piercy, and L. Evans, “Absorption of sound by the atmosphere,” in Physical Acoustics, edited by W. P. Mason and R. N. Thurston (Academic, New York 1984), Vol. 17, pp. 145-232.
33. S. M. Sze, VLSI Technology, 2nd ed. (Mcgraw-Hill, New York, 1988).
34. ANSI, ANSI S1.12-1967 “Specifications for laboratory standard microphones” (American National Standards Institute, New York, 1986).
35. Encyclopedia of Polymer Science and Technology, Norman G. Gaylord, executive editor (Interscience, New York, 1964).