A subminiature condenser microphone with silicon nitride membrane and silicon back plate

Journal of the Acoustical Society of America

Volumn 85, Issue 1, 1989, Pages 476-480

  Hohm, Dietmar ^a   Hess, Gisela ^b  

^a Federal Republic of Germany ^*

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040755792     PISSN: 00014966     EISSN: NA     Source Type: Journal    
DOI: 10.1121/1.397699     Document Type: Article

References (13)

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