Electroacoustic Model for Electrostatic Ultrasonic Transducers with V-Grooved Backplates

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 42, Issue 1, 1995, Pages 1-7

  Mattila, Pentti ^a   Tsuzuki, Fabio ^a   Väätäjä, Heli ^a   Sasaki, Ken ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; CAPACITANCE; ELECTRIC RESISTANCE; ELECTROSTATIC DEVICES; ENERGY CONVERSION; FREQUENCIES; MATHEMATICAL MODELS; ULTRASONIC TRANSDUCERS;

MECHANICAL COMPLIANCE; RESONANT FREQUENCY; ULTRASONIC FREQUENCY; V GROOVED BACKPLATES;

EQUIVALENT CIRCUITS;

EID: 0029229796     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.368320     Document Type: Article

References (10)

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