In situ acoustic temperature tomography of semiconductor wafers

Applied Physics Letters

Volumn 64, Issue 11, 1994, Pages 1338-1340

  Levent Degertekin, F ^a   Pei, Jun ^a   Khuri Yakub, Butrus T ^a   Saraswat, Krishna C ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001170030     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.111927     Document Type: Article

References (8)