Impact of MEMS technology on society

Sensors and Actuators, A: Physical

Volumn 56, Issue 1-2, 1996, Pages 1-9

  Bryzek, Janusz ^a  

^a Intelligent MicroSensor Technology   (United States)

Author keywords

Microelectromechanical systems; Technology

Indexed keywords

ECONOMIC AND SOCIAL EFFECTS; MARKETING; SILICON; TECHNOLOGICAL FORECASTING;

SILICON MICROMECHANICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030206053     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01284-8     Document Type: Article

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