Observation and control of Si surface and interface processes for nanostructure formation by scanning reflection electron microscopy

Journal of Physics Condensed Matter

Volumn 11, Issue 49, 1999, Pages 9861-9870

  Ichikawa, Masakazu ^a  

^a JT RES CENTER FOR ATOM TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012400088     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/11/49/304     Document Type: Article

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