Development of a multifunctional surface analysis system based on a nanometer scale scanning electron beam: Combination of ultrahigh vacuum-scanning electron microscopy, scanning reflection electron microscopy, Auger electron spectroscopy, and x-ray photoelectron spectroscopy

Review of Scientific Instruments

Volumn 67, Issue 12, 1996, Pages 4185-4190

  Watanabe, Heiji ^a   Ichikawa, Masakazu ^a  

^a NATL INST FOR ADV INTERDISC RES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000057059     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147567     Document Type: Article

References (7)

1. A. N. Broers, W. W. Molzen, J. J. Cuomo, and N. D. Wittels, Appl. Phys. Lett. 29, 596 (1976).
2. S. Matsui, T. Ichihashi, and M. Mito, J. Vac. Sci. Technol. B 7, 1182 (1989).
3. For example, Q. Xie, A. Madhukar, P. Chen, and N. P. Kobayashi, Phys. Rev. Lett. 75, 2542 (1995).
4. M. Ichikawa and T. Doi, in Reflection High Energy Electron Diffraction and Reflection Electron Imaging of Surfaces, edited by P. K. Larsen and P. J. Dobson, NATO ASI Series (Plenum, New York, 1988), Vol. 188, p. 343.
5. J. Liu and J. M. Cowley, Ultramicroscopy 48, 381 (1993).
6. J. Liu, G. G. Hembree, G. E. Spinnler, and J. A. Venables, Ultramicroscopy 52, 369 (1993).
7. A. Endo and S. Ino, Surf. Sci. 293, 165 (1993).