A review of thin-film crystalline silicon for solar cell applications. Part 1: Native substrates

Solar Energy Materials and Solar Cells

Volumn 68, Issue 2, 2001, Pages 135-171

  Michelle, J McCann ^a   Kylie, R Catchpole ^a   Klaus, J Weber ^a   Andrew, W Blakers ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Crystalline silicon; Review; Thin film

Indexed keywords

EID: 0010316982     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(00)00242-7     Document Type: Article

References (137)

1. J. Hötzel, K. Peter, G. Willeke, E. Bucher, Crystalline silicon solar cells prepared by a rapid liquid phase epitaxy (RLPE) growth technique, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1421.
2. F.R. Faller, V. Henninger, A. Hurrle, N. Schillinger, Optimization of the CVD process for low-cost crystalline-silicon thin-film solar cells, Second World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1278.
3. J.K. Arch, J.H. Werner, E. Bauser, Sol. Energy Mater. Sol. Cells 29 (1993) 387.
4. A. Voigt, B. Steiner, W. Dorsch, J. Krinke, M. Albrecht, H.P. Strunk, G. Wagner, J. Crystal Growth 166 (1996) 694.
5. K. Peter, G. Willeke, E. Bucher, Rapid growth of hiqh quality crystalline silicon by a novel temperature gradient liquid phase epitaxy (LPE) technique, 13th European PV Solar Energy Conference, Nice, 1995, p. 379.
6. S. Nishida, K. Nakagawa, M. Iwane, Y. Iwasaki, N. Ukiyo, M. Mizutani, T. Shoji, Si film growth using liquid phase epitaxy method and its application to thin-film crystalline Si solar cell, Technical Digest of the International PVSEC-11, Sapporo, 1999.
7. R. Bergmann, S. Robinson, Z. Shi, J. Kurianski, Sol. Energy Mater. Sol. Cells 31 (1993) 447.
8. M. Konuma, I. Silier, E. Czech, E. Bauser, Sol. Energy Mater. Sol. Cells 34 (1994) 251.
9. B. Thomas, G. Müller, P. Heidborn, H. Wawra, Growth of polycrystalline silicon thin films using the temperature difference method, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1483.
10. Z. Shi, W. Zhang, G.F. Zheng, V.L. Chin, A. Stephens, M.A. Green, R. Bergmann, Sol. Energy Mater. Sol. Cells 41/42 (1996) 53.
11. N. Rauf, H. El Omari, A. Laugier, R. Gauthier, Characterisation of liquid phase epitaxy thin film silicon using tin as solvent, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1419.
12. M.L. Hitchman, K.F. Jensen, Chemical Vapor Deposition, Academic Press, New York, 1993.
13. A. Sherman, Chemical Vapor Deposition for Microelectronics, Noyes Publications, Westwood, NJ, 1987.
14. H.O. Pierson, Handbook of Chemical Vapor Deposition, Noyes Publications, Westwood, NJ, 1992.
15. B. Loisel, L. Haji, M. Guendouz, J. Phys. (Colloque) (1989).
16. N. Beldi, K. Kis-sion, D. Briand, T. Mohammed-Brahim, M. Sarret, F. le Bihan, O. Bonnaud, J.P. Kleider, C. Longeaud, A.R. Middya, J. Guillet, Hot-wire hydrogen passivation of polycrystalline silicon films deposited by LPCVD, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
17. T. Mohammed-Brahim, K. Kis-sion, D. Braind, M. Sarret, O. Bonnaud, Towards large grain size and high thickness polycrystalline silicon films for silicon solar cells. 13th European Photovoltaic Solar Energy Conference, Nice, 1995.
18. R. Rogel, K. Kis-sion, T. Mohammed-Brahim, M. Sarret, O. Bonnaud, J.P. Kleider, High quality LPCVD polycrystalline silicon films in solar cell applications, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
19. Y. Laghla, E. Scheid, H. Vergnes, J.P. Couderc, Sol. Energy Mater. Sol. Cells 48 (1997) 303.
20. E. Conrad, L. Elstner, W. Fuhs, W. Henrion, P. Müller, J. Poortmans, B. Selle, U. Zeimer, Low-temperature homoepitazy of silicon by electron cyclotron resonance CVD. 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
21. Ritsuke Iiduka, Akira Heya, Hideki Matsumura, Sol. Energy Mater. Sol. Cells 48 (1997) 279.
22. K. Okitsu, M. Imaizumi, K. Yamaguchi, A. Khan, M. Yamaguchi, M. Ban, M. Tokai, K. Kawamura, Reduction of plasma-induced damage by electron beam excited plasma CVD. Technical Digest of the International PVSEC-11, Sapporo, 1999.
23. Licai Wang, Mei Gu, H.S. Reehal, Low temperature growth of crystalline silicon thin films by ECR plasma CVD for solar cells, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
24. P. Müller, I. Beckers, E. Conrad, L. Wlstner, W. Fuhs, Application of low-temperature electron cyclotron resonance CVD to silicon thin-film solar cell preparation. 25th Photovoltaic Solar Conference, Washington, 1996.
25. A.R. Middya, J. Guillet, J. Perrin, A. Lloret, J.E. Bourée. Hot-wire chemical vapour deposition of polycrystalline silicon films, 13th European Photovoltaic Solar Energy Conference, Nice, 1995.
26. J.K. Rath, H. Meiling, R.E.I. Schropp, Sol. Energy Mater. Sol. Cells 48 (1997) 269.
27. J. Cifre, J. Bertomeu, J. Puigdollers, M.C. Polo, J. Andreu, A. Lloret, Appl. Phys. A (1994).
28. H.N. Wanka, M.B. Schubert, A. Hierzenberger, V. Baumung, Prospects of microcrystalline silicon from hot-wire CVD for photovoltaic applications, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
29. A. Breymesser, V. Plunger, M. Ramasori, V. Schlosser, M. Nelhiebel, P. Schattschneider, D. Peiro, C. Voz, J. Bertomeau, J. Andreu, Investigations of polycrystalline silicon layers deposited by hot wire CVD, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
30. T. Baba, M. Shima, T. Matsuyama, S. Tsuge, K. Wakisaka, S. Tsuda, 9.2% efficiency thin-film polycystalline silicon solar cell by a novel solid phase crystallisation method, 13th European Photovoltaic Solar Energy Conference, Nice, 1995.
31. Takao Matsuyama, Toshiaki Baba, Tsuyoshi Takahama, Shinya Tsuda, Shoichi Nakano, Sol. Energy Mater. Sol. Cells 34 (1994) 285.
32. Ricardo Rüther, John Livingstone, Nick Dytlewski, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
33. Yuwen Zhao, Zhongming Li, Feng Yun, Xianbo Liao, Zhixun Ma, Guozhen Yue, Hongwei Kiao, Jie He, Guanglin Kong, Polycrystalline silicon films prepared by an improved pulsed rapid thermal annealing. Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
34. F.G. Shi, H.Y. Tong, J.D. Ayers, Appl. Phys. Lett. 67 (1995) 350.
35. R.B. Bergmann, Recent Res. Dev. Crystal Growth Res. (1999).
36. R.L. Wallace, J.I. Hanoka, S. Narasimha, S. Kamra, A. Rohatgi, Thin silicon string ribbon for high efficiency polycrystalline solar cells, 26th Photovoltaic Solar Conference, Anaheim, 1997.
37. R.L. Wallace, J.I. Hanoka, A. Rohatgi, G. Crotty, Sol. Energy Mater. Sol. Cells 48 (1997) 179.
38. R. Janoch, R. Wallace, J.I. Hanoka, Commercialization of silicon sheet via the string ribbon crystal growth technique, 26th Photovoltaic Solar Conference, Anaheim, 1997.
39. S. Narasimha, G. Crotty, T. Krygowski, A. Rohatgi, D.L. Meier, Back surface field and emitter passivation effects in the record high efficiency n-type dendritic web silicon solar cell, 26th Photovoltaic Solar Conference, Anaheim, 1997.
40. M.J. Kardauskas, M.D. Rosenblum, B.H. Mackintosh, J.P. Kalejs, The coming of age of a new PV wafer technology - some aspects of EFG polycrystalline silicon sheet manufacture, 25th Photovoltaic Solar Conference, Washington, 1996.
41. J.A. Mazer, Solar Cells: An Introduction to Crystalline Photovoltaic Technology, Kluwer Academic Publishers, Dordrecht, 1997.
42. Wolfgang Koch, Hans-Ullrich Höfs, Christian Häßler, Siegried Thurm, Preparation, characterisation and cell processing of bayer RGS silicon foils (ribbon growth on substrate), Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
43. M.A. Green, Solar Cells. Operating Principles, Technology and System Applications, The University of New South Wales, South Wales, 1992.
44. G. Hahn, C. Zechner, B. Bitnar, M. Spiegel, W. Jooss, P. Fath, G. Willeke, E. Bucher, H.U. Höfs, Progr. Photovoltaics 6 (1998) 163.
45. D.L. Meier, Status of EBARA Solar, Eighth Workshop on Crystalline Silicon Solar Cell Materials and Processes, Colorado, 1998.
46. D.L. Meier, H.P. Davis, R.A. Garcia, J. Salami, A. Rohatgi, A. Ebong, P. Doshi, M. Finnegan, Aluminium alloy back p-n junction dendritic web silicon solar cell, Technical Digest of the International PVSEC-11, Sapporo, 1999.
47. R.L. Wallace, R.E. Janoch, J.I. Hanoka, String ribbon - a new silicon sheet growth method, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
48. H. Eldin, A. Elgamel, J. Gobrecht, A simple and efficient process for fabricating high efficiency polycrystalline silicon ribbon solar cells, Technical Digest of the International PVSEC-11, Sapporo, 1999.
49. D.S. Ruby, W.H. Wilbanks, C.B. Fleddermann, J.I. Hanoka, The effect of hydrogen-plasma and pecvd-nitride deposition on bulk and surface passivation in string ribbon Si solar cells, 13th European Photovoltaic Solar Energy Conference, Nice, 1995.
50. V. Yelundur, A. Ebong, S. Kamra, A. Rohatgi, J. Hanoka, A. Gabor, Approach towards high efficiency, manufacturable thin sring ribbon silicon solar cells, Eighth Workshop on Crystalline Silicon Solar Cell Materials and Processes, Colorado, 1998.
51. J.P. Kalejs, W. Schmidt, High productivity methods of preparation of EFG ribbon silicon wafers, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
52. O. Evrard, F. Duerinckx, T. Vermeulen, J. Horzel, J. Poortmans, J. Nijs, R. Mertens, C. Vinckier, F. Faller, N. Schillinger, A. Eyer, A. Rauber, The effect of hydrogen passivation on the electrical transport properties and cell characteristics of SSP Si foils, 13th European Photovoltaic Solar Energy Conference, Nice, 1995.
53. A. Eyer, N. Schillinger, I. Reis, A. Räuber, Crystal Growth 104 (1990) 119.
54. H. Nussbaumer, G. Willeke, E. Bucher, Self-supporting silicon sheet prepared by zone melting of silicon powder on reusable substrates, 13th European Photovoltaic Solar Energy Conference, Nice (1995).
55. G. Hahn, C. Zechner, M. Spiegel, W. Jooss, P. Fath, G. Willeke, E. Bucher, Mechanical texturisation and hydrogen passivation of RGS (ribbon growth on substrate) silicon solar cells, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
56. A.W. Blakers, Sol. Energy Mater. Sol. Cells 51 (1998) 385.
57. O. Evrard, E. Demesmaeker, T. Vermeulen, M. Zagrebnov, M. Caymax, W. Laureys, J. Poortmans, J. Nijs, R. Mertens, The analysis of the limiting recombination mechanisms on high efficiency thin film cells grown with CVD epitaxy, 13th European PV Solar Energy Conference, Nice, 1995, p. 440.
58. J.K. Arch, R. Brendel, J.H. Werner, Sol. Energy Mater. Sol. Cells (1997).
59. A.W. Blakers, J.H. Werner, E. Bauser, H.J. Queisser, Appl. Phys. Lett. 60 (1992) 2752.
60. J.H. Werner, J.K. Arch, R. Brendel, G. Langguth, M. Konuma, E. Bauser, G. Wagner, B. Steiner, W. Appel, 12th European PV Solar Energy Conference, Amsterdam, 1994.
61. H.V. Campe, D. Nikl, W. Schmidt, F. Schomann, Crystalline silicon thin film solar cells, 13th European PV Solar Energy Conference, Nice, 1995, p. 1489.
62. J.H. Werner, S. Kolodinski, U. Rau, J.K. Arch, E. Bauser, Appl. Phys. Lett. 62 (1993) 2998.
63. A.W. Blakers, K.J. Weber, M.F. Stuckings, S. Armand, G. Matlakowski, M.J. Stocks, A. Cuevas, 18% efficient thin silicon solar cell by liquid phase epitaxy, 13th European PV Solar Energy Conference, Nice, 1995, p. 33.
64. A.W. Blakers, K.J. Weber, M.F. Stuckings, S. Armand, G. Matlakowski, A.J. Carr, M.J. Stocks, A. Cuevas, T. Brammer, Progr. Photovoltaics 3 (1995) 193.
65. G.F. Zheng, W. Zhang, Z. Shi, M. Gross, A.B. Sproul, S.R. Wenham, M.A. Green, Sol. Energy Mater. Sol. Cells 40 (1996) 231.
66. G.F. Zheng, S.R. Wenham, M.A. Green, Progr. Photovoltaics 4 (1996) 369.
67. 4 by RTCVD, Second World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1740.
68. G.F. Zheng, W. Zhang, Z. Shi, D. Thorp, R.B. Bergmann, M.A. Green, Sol. Energy Mater. Sol. Cells 51 (1998) 95.
69. G.F. Zheng, W. Zhang, Z. Shi, D. Thorp, M.A. Green, High-efficiency drift-field thin-film silicon solar cells by liquid-phase epitaxy and substrate thinning, 25th IEEE PV Specialists Conference, Washington, 1996.
70. G. Ballhorn, K.J. Weber, S. Armand, M.J. Stocks, A.W. Blakers, High efficiency thin multicrystalline silicon solar cells by liquid phase epitaxy, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1011.
71. + multicrystalline-Si substrates, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 728.
72. T. Vermeulen, J. Poortmans, M. Caymax, F. Duerinckx, S. Maene, J. Szlufcik, J. Nijs, R. Mertens, N.B. Mason, T.M. Bruton, Application of industrial processing techniques to thin-film crystalline solar cells on highly doped defected silicon substrates, Second World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1209.
73. T. Vermeulen, F. Deurinckx, K De Clercq, J. Szlufcik, J. Poortmans, P. Laermans, M. Caymax, J. Nijs, R. Mertens, Cost-effective thin film solar cell processing on multicrystalline silcon, 26th IEEE PV Specialists Conference, Anaheim, 1997, p. 267.
74. A. Rohatgi, P. Doshi, M. Ropp, L. Cai, A. Doolittle, S. Narasimha, T. Krygowski, K. Tate, D. Yang, M.A. El-Sayed, J. Rand, D. Ruby, D.L. Meier, Improved understanding and optimization of RTP and PECVD processes for high-efficiency silicon solar cells, 13th European PV Solar Energy Conference, Nice, 1995.
75. T.H. Wang, T.F. Ciszek, C.R. Schwerdtfeger, H. Moutinho, R. Matson, Sol. Energy Mater. Sol. Cells 41/42 (1996) 19.
76. T.F. Ciszek, J.M. Gee, Crystalline silicon R&D at the U.S. national centre for photovoltaics, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 53.
77. T. Vermeulen, O. Evrard, W. Laureys, J. Poortmans, M. Caymax, J. Nijs, R. Mertens, C. Vinckier, H.-U. Höfs, Realisation of thin film solar cells in epitaxial layers grown on highly-doped RGS-ribbons, 13th European PV Solar Energy Conference, Nice, 1995, p. 1501.
78. G. Wagner, B. Steiner, B. Winter, W. Dorsch, A. Voigt, H.P. Strunk, R. Brendel, M. Wolf, J.H. Werner, Polycrystalline silicon layers on low cost silicon ribbons for photovoltaic cell application, 13th European PV Solar Energy Conference, Nice, 1995, p. 461.
79. F. Faller, N. Schillinger, A. Hurrle, C. Schetter, A. Eyer, Mc-Si thin film solar cells by fast CVD on low cost SSP pre-ribbons, 25th IEEE PV Specialists Conference, Washington, 1996, p. 645.
80. F.R. Faller, N. Schillinger, A. Hurrle, C. Schetter, Improvement and characterisation of mi-Si thin-film solar cells on low cost SSP ribbons, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 784.
81. T. Vermeulen, J. Poortmans, K. Said, O. Evrard, W. Laureys, M. Caymax, J. Nijs, R. Mertens, C. Vinckier, Interaction between bulk and surface passivation mechanisms in thin film solar cells on defected silicon substrates, 25th IEEE PV Specialists Conference, Washington, 1996, p. 653.
82. 2 barrier layers for crystalline silicon thin-film solar cells, Second World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1798.
83. R. Bilyalov, L. Stalmans, G. Beaucarne, R. Loo, M. Caymax, J. Poortmans, J. Nijs, Porous silicon as an intermediate layer for thin film solar cell, Technical Digest of the International PVSEC-11, Sapporo, 1999.
84. A.J. van Zutphen, M. Zeman, F.D. Tichelaar, J.W. Metselaar, Deposition of thin film silicon by thermal CVD processes for application in solar cells, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1440.
85. T. Ishihara, S. Arimoto, H. Kumabe, T. Murotani, Progr. Photovoltaics 3 (1995) 105.
86. T. Ishihara, S. Arimoto, H. Morikawa, H. Kumabe, T. Murotani, S. Mitsui, Appl. Phys. Lett. 63 (1993) 3604.
87. S. Arimoto, H. Morikawa, M. Deguchi, Y. Kawama, Y. Matsuno, T. Ishihara, H. Kumabe, T. Murotani, Sol. Energy Mater. Sol. Cells 34 (1994) 257.
88. H. Naomoto, S. Hamamoto, A. Takami, S. Arimoto, T. Ishihara, Sol. Energy Mater. Sol. Cells 48 (1997) 261.
89. Y. Kawama, A. Takami, In-situ control in zone-melting recrystallisation process for formation of high quality thin film polycrystalline Si, 25th IEEE PV Specialists Conference, Washington, 1996, p. 481.
90. G. Beaucarne, C. Hebling, R. Scheer, J. Poortmans, Thin silicon solar cells based on recrystallised layers on insulating substrates, Second World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1794.
91. S. Reber, W. Zimmerman, T. Kieliba, S.W. Glunz, Zone melting recrystallization of silicon films for crystalline silicon thin film solar cells, Technical Digest of the International PVSEC-11, 1999, Sapporo.
92. W. Zimmerman, S. Bau, F. Haas, K. Schmidt, A. Eyer, Silicon sheets from powder as low cost substrates for crystalline silicon thin film solar cells, Second World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1790.
93. F. Banhart, R. Bergmann, F. Phillipp, E. Bauser, Appl. Phys. A 53 (1991) 317.
94. D.J. Aiken, D.D. Smith, A.M. Barnett, A device structure for thin, light trapped epitaxial silicon solar cells, 25th IEEE PV Specialists Conference, Washington, 1996, p. 685.
95. T. Arai, T. Nakamura, H. Shirai, Jpn. J. Appl. Phys. 36 (1997) 4907.
96. T. Arai, T. Nakamura, H. Shirai, Jpn. J. Appl. Phys. 35 (1996) L1161.
97. F. Zhu, H. Kohara, T. Fuyuki, H. Matsunami, Jpn. J. Appl. Phys. 35 (1996) 3321.
98. H. Kumomi, T. Yonehara, Jpn. J. Appl. Phys. 36 (1997).
99. 2-layers for thin-film solar cells, 25th IEEE PV Specialists Conference, Washington, 1996, p. 649.
100. S. Hamamoto, H. Morikawa, H. Naomoto, Y. Kawama, A. Takami, S. ARimoto, T. Ishihara, K. Namba, Development of the VEST cell process for low cost fabrication, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
101. Nobuhiko Sato, Kiyofumi Sakaguchi, Kenji Yamagata, Yasutomo Fujiyama, Jun Nakayama, Takao Yonehara, Jpn. J. Appl. Phys. 35 (1996) 973.
102. R. Brendel, D. Scholten, M. Schulz, S. Oelting, H. Artmann, W. Frey, J. Krinke, H.P. Strunk, J.H. Werner, Waffle cells fabricated by the perforated silicon (ψ process) Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
103. H. Morikawa, Y. Nichimoto, H. Naomoto, Y. Kawama, A. Takami, S. Arimoto, T. Ishihara, K. Namba, Sol. Energy Mater. Sol. Cells 53 (1998) 23.
104. H. Morikawa, Y. Kawama, Y. Matsuno, S. Hamamoto, K. Imada, T. Ishihara, K. Kojima, T. Ogama, Development of high efficiency thin film Si solar cells using zone melting recrystallisation, Technical Digest of the International PVSEC-11, Sapporo, 1999.
105. Hiroshi Tayanaka, Kazushi Yamauchi, Takeshi Matsushita, Thin-film crystalline silicon solar cells obtained by separation of a porous silicon sacrificial layer, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
106. Rolf Brendel, A novel process for ultrathin monocrystalline silicon solar cells on glass, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
107. R.B. Bergmann, T.J. Rinke, T.A. Wagner, J.H. Werner, thin film solar cells on glass by transfer of quasi-monocrystalline Si films, Technical Digest of the International PVSEC-11, Sapporo, 1999.
108. J. Krinke, G. Kuchler, R. Brendel, H. Artmann, W. Frey, S. Oelting, M. Schulz, H.P. Strunk, Microstructure and electrical properties of epitaxial layers deposited on silicon by ion assisted deposition, Technical Digest of the International PVSEC-11, Sapporo, 1999.
109. R.B. Bergmann, T.J. Rinke, R.M. Hausner, M. Grauvogl, M. Vetter, J.H. Werner, Int. J. Photoenergy 1 (1) (1999) 83.
110. K.R. Catchpole, K.J. Weber, A.B. Sproul, A.W. Blakers, Characterisation of silicon epitaxial layers for solar cell applications, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
111. K.J. Weber, K. Catchpole, M. Stocks, A.W. Blakers, Lift-off of silicon epitaxial layers for solar cell applications, 26th Photovoltaic Solar Conference, Anaheim, 1997.
112. Ruth DeJule, Semicond. Int. (Nov. 1998) 40.
113. Press release, Bernin, France, April 7, 1999.
114. M. Bruel, Electron. Lett. 31 (1995) 1201.
115. A. Fave, B. Semmache, J.M. Olchowik, P. Kleiman, A. Laugier, Liquid phase epitaxial silicon layer with pyramidal structure obtained on an etched silicon grid, Technical Digest of the International PVSEC-11, Sapporo, 1999.
116. P. Campbell, M.A. Green, J. Appl. Phys. 62 (1987) 243.
117. D. Thorp, P. Cambell, S.R. Wenham, Progr. Photovoltaics: Res. Appl. 4 (1996) 205.
118. J.A. Rand, P.A. Basore, Light-trapping silicon solar cells, Experimental results and analysis, IEEE PV Specialists Conference, 1991, pp. 192-197.
119. R. Brendel, A. Gier, M. Mennig, H. Schmidt, J.H. Wener, J. Non-Cryst. Solids 218 (1997) 391-394.
120. D. Thorp, P. Campbell, S.R. Wenham, Absorption enhancement in confromally textrued thin-film silicon solar cells, 25th Photovoltaic Solar Conference, Washington, 1996, pp. 705-708.
121. Kenji Yamamoto, Takayuki Suzuki, Masashi Yoshimi, Akihiho Nakajima, Jpn. J. Appl. Phys. Part 2 36 (1997) L569.
122. Akihiko Nakajima, Takayuki Suzuki, Masashi Yoshimi, Kenji Yamamoto, Sol. Energy Mater. Sol. Cells 48 (1997) 287-294.
123. U. Rau, T. Meyer, M. Goldbach, Numerical simulation of innovative device structures for silicon thin-film solar cells, 25th Photovoltaic Solar Conference, Washington, 1996, pp. 469-472.
124. R. Brendel, Optical design of crystalline thin layer silicon solar cells on glass, 13th European Photovoltaic Solar Energy Conference, Nice, 1995, pp. 436-439.
125. R.B. Bergmann, R. Brendel, M. Wolf, P. Lölgen, J.H. Werner, J. Krink, H.P. Strunk, Crystalline silicon films by chemical vapor deposition on glass for thin film solar cells, 25th Photovoltaic Solar Conference, Washington, 1996, pp. 365-370.
126. A. Poruba, Z. Reměs, J. Špringer, M. Vaněček, A. Fejfar, J. Kočka, J. Meier, P. Torres, A. Shah, Light scattering in microcrystalline silicon thin film cells, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998, pp. 781-784.
127. O. Vetterl, A. Lambertz, F. Finger, B. Rech, O. Kluth, H. Wagner, Thickness dependence of microcrystalline silicon solar cell properties, Technical Digest of the International PVSEC-11, Sapporo, 1999.
128. L. Feitknecht, O. Kluth, Y. Ziegler, X. Niquille, P. Torres, J. Meier, N. Wyrsch, A. Shah, Microcrystalline NIP solar cells deposited at Å/sec by VHF-GD, Technical Digest of the International PVSEC-11, Sapporo, 1999.
129. Shin ichi Mizuno, Kazushi Yamauchi, Hiroshi Tayanaka, Takeshi Matsushita, Flexible single-crystal Si solar cells on plastic films, Technical Digest of the International PVSEC-11, Sapporo, 1999.
130. L. Stalmans, J. Poortmans, M. Caymaz, H. Bender, S. Jin, J. Nijs, R. Mertens, Realization of light confinement in thin crystalline Si films grown on porous silicon, Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998, pp. 124-127.
131. L. Stalmans, W. Laureys, K. Said, E. Vazsonyi, M. Caymaz, J. Poortmans, J. Nijs, R. Mertens, S. Strehlke, C. Lévy-Clément, A. Slaoui, G. Brémond, A. Daami, A. Laugier, The use of porous silicon in photovoltaic applications, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997, pp. 980-985.
132. L. Stalmans, W. Laureys, K. Said, E. Vazsonyi, M. Caymaz, J. Poortmans, J. Nijs, R. Mertens, S. Strehlke, C. Lévy-Clément, A. Slaoui, G. Brémond, A. Daami, A. Laugier, The use of porous silicon in photovoltaic applications, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997, pp. 980-985.
133. É. Vázsonyi, M. Fried, T. Lohner, M. Ádám, T. Mohácsy, I. Bársony, J. Szlufcik, F. Duerinckx, J. Nijs, High efficiency silicon PV cells with surface treatment by anodic etching, 13th European Photovoltaic Solar Energy Conference, Nice, 1995, pp. 37-40.
134. J. Zettner, M. Thoenissen, Th. Hierl, R. Brendel, M. Schulz, Novel porous silicon backside light reflector for thin silicon solar cells, Progress in Photovoltaics: Research and Applications 6 (1998) 423.
135. J. Zettner, H.v. Campe, M. Thoenissen, R. Auer, J. Ackermann, Th. Hierl, R. Brendel, M. Schulz, Porous silicon reflector for thin silicon solar cells, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998, pp. 1766-1769.
136. V.A. Skryshevsky, A. Laugier, v.I. Strikha, V.A. Vikulov, A. Kaminski, Effect of porous silicon layer re-emission on silicon solar cell photocurrent, 25th Photovoltaic Solar Conference, Washington, 1996, pp. 589-592.
137. K. Feldrapp, D. Scholten, S. Oelting, H. Nagel, M. Steinhof, R. Brendel, Thin monocrystalline Si solar cells fabricated by the porous Si (PSI) process using ion assisted deposition, 16th European PV Solar Energy Conference, Glasgow, 2000.