Tunneling into interface states as reliability monitor for ultrathin oxides

IEEE Transactions on Electron Devices

Volumn 47, Issue 12, 2000, Pages 2358-2365

  Ghetti, Andrea ^a   Sangiorgi, Enrico ^a   Bude, Jeff ^a   Sorsch, T W ^a   Weber, Gary ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

Interface states; Low voltage tunneling; Ultrathin oxide reliability

Indexed keywords

EID: 0001663476     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.887022     Document Type: Article

References (26)

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