SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 88, Issue 7, 2000, Pages 4085-4090

In situ monitoring of GaN metal-organic vapor phase epitaxy by spectroscopic ellipsometry

(6) Peters, S a Schmidtling, T b Trepk, T b Pohl, U W b Zettler, J T b Richter, W b

a SENTECH INSTRUMENTS GMBH (Germany)

b TECHNISCHE UNIVERSITÄT BERLIN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001450067 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1289047 Document Type: Article

Times cited : (49)

References (30)

1
- 0042625682
- S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, Y. Sugimoto, and H. Kiyoku, Appl. Phys. Lett. 69, 4056 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 4056
- Nakamura, S.¹ Senoh, M.² Nagahama, S.³ Iwasa, N.⁴ Yamada, T.⁵ Matsushita, T.⁶ Sugimoto, Y.⁷ Kiyoku, H.⁸

2
- 0032635193
- S. Nakamura, M. Senoh, S. Nagahama, T. Matsushita, H. Kiyoku, Y. Sugimoto, T. Kosaki, H. Umemoto, M. Sano, and T. Mukai, Jpn. J. Appl. Phys., Part 2 38, L226 (1999).
- (1999) Jpn. J. Appl. Phys., Part 2 , vol.38
- Nakamura, S.¹ Senoh, M.² Nagahama, S.³ Matsushita, T.⁴ Kiyoku, H.⁵ Sugimoto, Y.⁶ Kosaki, T.⁷ Umemoto, H.⁸ Sano, M.⁹ Mukai, T.¹⁰

3
- 0032607584
- M. Kneissl, D. P. Bour, C. G. Van de Walle, L. T. Roman, J. E. Northrup, R. M. Wood, M. Teepe, and N. M. Johnson, Appl. Phys. Lett. 75, 581 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 581
- Kneissl, M.¹ Bour, D.P.² Van De Walle, C.G.³ Roman, L.T.⁴ Northrup, J.E.⁵ Wood, R.M.⁶ Teepe, M.⁷ Johnson, N.M.⁸

4
- 0032025791
- Y.-K. Song, M. Kuball, A. V. Nurmikko, G. E. Bulman, K. Doverspike, S. T. Sheppard, T. W. Weeks, M. Leonard, H. S. Kong, H. Dieringer, and J. Edmond, Appl. Phys. Lett. 72, 1418 (1998).
- (1998) Appl. Phys. Lett. , vol.72 , pp. 1418
- Song, Y.-K.¹ Kuball, M.² Nurmikko, A.V.³ Bulman, G.E.⁴ Doverspike, K.⁵ Sheppard, S.T.⁶ Weeks, T.W.⁷ Leonard, M.⁸ Kong, H.S.⁹ Dieringer, H.¹⁰ Edmond, J.¹¹

5
- 0026188327
- S. Nakamura, Jpn. J. Appl. Phys., Part 1 30, 1348 (1991); S. Nakamura, 30, 1620 (1991).
- (1991) Jpn. J. Appl. Phys., Part 1 , vol.30 , pp. 1348
- Nakamura, S.¹

6
- 0026203802
- S. Nakamura, Jpn. J. Appl. Phys., Part 1 30, 1348 (1991); S. Nakamura, 30, 1620 (1991).
- (1991) Jpn. J. Appl. Phys., Part 1 , vol.30 , pp. 1620
- Nakamura, S.¹

7
- 0028761913
- M. Zorn, J. Jönsson, A. Krost, W. Richter, J.-T. Zettler, K. Ploska, and F. Reinhardt, J. Cryst. Growth 145, 53 (1994).
- (1994) J. Cryst. Growth , vol.145 , pp. 53
- Zorn, M.¹ Jönsson, J.² Krost, A.³ Richter, W.⁴ Zettler, J.-T.⁵ Ploska, K.⁶ Reinhardt, F.⁷

8
- 0032477108
- J.-T. Zettler, K. Haberland, M. Zorn, M. Pristovsek, W. Richter, P. Kurpas, and M. Weyers, J. Cryst. Growth 195, 151 (1998).
- (1998) J. Cryst. Growth , vol.195 , pp. 151
- Zettler, J.-T.¹ Haberland, K.² Zorn, M.³ Pristovsek, M.⁴ Richter, W.⁵ Kurpas, P.⁶ Weyers, M.⁷

9
- 0347523074
- Prague (unpublished), T2M2
- M. Luenebuerger, H. Protzmann, M. Heuken, and H. Juergensen, Proceedings of the European Workshop on MOVPE, Prague 1999 (unpublished), p. 341, T2M2.
- (1999) Proceedings of the European Workshop on MOVPE , pp. 341
- Luenebuerger, M.¹ Protzmann, H.² Heuken, M.³ Juergensen, H.⁴

10
- 0000045472
- S. Logothetidis, J. Petalas, M. Cardona, and T. D. Moustakas, Phys. Rev. B 50, 18017 (1994).
- (1994) Phys. Rev. B , vol.50 , pp. 18017
- Logothetidis, S.¹ Petalas, J.² Cardona, M.³ Moustakas, T.D.⁴

11
- 0031998227
- T. Wethkamp, K. Wilmers, N. Esser, W. Richter, O. Ambacher, H. Angerer, G. Jungk, R. L. Johnson, and M. Cardona, Thin Solid Films 313/ 314, 745 (1998).
- (1998) Thin Solid Films , vol.313-314 , pp. 745
- Wethkamp, T.¹ Wilmers, K.² Esser, N.³ Richter, W.⁴ Ambacher, O.⁵ Angerer, H.⁶ Jungk, G.⁷ Johnson, R.L.⁸ Cardona, M.⁹

12
- 0043229647
- O. Briot, J. P. Alexis, M. Tchounkeu, and R. L. Aulombard, Mater. Sci. Eng., B 43, 147 (1997).
- (1997) Mater. Sci. Eng., B , vol.43 , pp. 147
- Briot, O.¹ Alexis, J.P.² Tchounkeu, M.³ Aulombard, R.L.⁴

13
- 0346262068
- Samples provided by Cree Research Inc., Durham, NC 27703
- Samples provided by Cree Research Inc., Durham, NC 27703.

14
- 0003808259
- North-Holland, Amsterdam
- R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.A.¹ Bashara, N.M.²

15
- 25344438933
- W. R. L. Lamprecht, B. Segall, J. Rife, W. R. Hunter, and D. K. Wickenden, Phys. Rev. B 51, 13 516 (1995).
- (1995) Phys. Rev. B , vol.51 , Issue.13 , pp. 516
- Lamprecht, W.R.L.¹ Segall, B.² Rife, J.³ Hunter, W.R.⁴ Wickenden, D.K.⁵

16
- 0003877566
- Springer, Berlin
- P. Y. Yu and M. Cardona, Fundamentals of Semiconductors (Springer, Berlin, 1996).
- (1996) Fundamentals of Semiconductors
- Yu, P.Y.¹ Cardona, M.²

17
- 0347523075
- unpublished
- J.-T. Zettler and T. Trepk (unpublished).
- Zettler, J.-T.¹ Trepk, T.²

18
- 84985616456
- B. Velicky and J. Sak, Phys. Status Solidi 16, 147 (1966).
- (1966) Phys. Status Solidi , vol.16 , pp. 147
- Velicky, B.¹ Sak, J.²

19
- 0000261524
- S. Fuke, H. Teshigawara, K. Kuwahara, Y. Takano, T. Ito, M. Yanagihara, and K. Ohtsuka, J. Appl. Phys. 83, 764 (1998).
- (1998) J. Appl. Phys. , vol.83 , pp. 764
- Fuke, S.¹ Teshigawara, H.² Kuwahara, K.³ Takano, Y.⁴ Ito, T.⁵ Yanagihara, M.⁶ Ohtsuka, K.⁷

20
- 22244476386
- S. Keller, B. P. Keller, Y.-F. Wu, B. Heying, D. Kapolnek, J. S. Speck, U. K. Mishra, and S. P. DenBaars, Appl. Phys. Lett. 68, 1525 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1525
- Keller, S.¹ Keller, B.P.² Wu, Y.-F.³ Heying, B.⁴ Kapolnek, D.⁵ Speck, J.S.⁶ Mishra, U.K.⁷ DenBaars, S.P.⁸

21
- 0000326438
- K. Uchida, A. Watanabe, F. Yano, M. Kouguchi, T. Tanaka, and S. Minagawa, J. Appl. Phys. 79, 3487 (1996).
- (1996) J. Appl. Phys. , vol.79 , pp. 3487
- Uchida, K.¹ Watanabe, A.² Yano, F.³ Kouguchi, M.⁴ Tanaka, T.⁵ Minagawa, S.⁶

22
- 0026244249
- S. Nakamura, Jpn. J. Appl. Phys., Part 2 30, L1705 (1991).
- (1991) Jpn. J. Appl. Phys., Part 2 , vol.30
- Nakamura, S.¹

23
- 0002030287
- X. H. Wu, D. Kapolnek, E. J. Tarsa, B. Heying, S. Keller, B. P. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 68, 1371 (1996); X. H. Wu, P. Fini, S. Keller, E. J. Tarsa, B. Heying, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Jpn. J. Appl. Phys., Part 2 35, L1648 (1996); X. H. Wu, P. Fini, E. J. Tarsa, B. Heying, S. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, J. Cryst. Growth 189/190, 231 (1998).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 1371
- Wu, X.H.¹ Kapolnek, D.² Tarsa, E.J.³ Heying, B.⁴ Keller, S.⁵ Keller, B.P.⁶ Mishra, U.K.⁷ DenBaars, S.P.⁸ Speck, J.S.⁹

24
- 0030415208
- X. H. Wu, D. Kapolnek, E. J. Tarsa, B. Heying, S. Keller, B. P. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 68, 1371 (1996); X. H. Wu, P. Fini, S. Keller, E. J. Tarsa, B. Heying, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Jpn. J. Appl. Phys., Part 2 35, L1648 (1996); X. H. Wu, P. Fini, E. J. Tarsa, B. Heying, S. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, J. Cryst. Growth 189/190, 231 (1998).
- (1996) Jpn. J. Appl. Phys., Part 2 , vol.35
- Wu, X.H.¹ Fini, P.² Keller, S.³ Tarsa, E.J.⁴ Heying, B.⁵ Mishra, U.K.⁶ DenBaars, S.P.⁷ Speck, J.S.⁸

25
- 0032094525
- X. H. Wu, D. Kapolnek, E. J. Tarsa, B. Heying, S. Keller, B. P. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 68, 1371 (1996); X. H. Wu, P. Fini, S. Keller, E. J. Tarsa, B. Heying, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Jpn. J. Appl. Phys., Part 2 35, L1648 (1996); X. H. Wu, P. Fini, E. J. Tarsa, B. Heying, S. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, J. Cryst. Growth 189/190, 231 (1998).
- (1998) J. Cryst. Growth , vol.189-190 , pp. 231
- Wu, X.H.¹ Fini, P.² Tarsa, E.J.³ Heying, B.⁴ Keller, S.⁵ Mishra, U.K.⁶ DenBaars, S.P.⁷ Speck, J.S.⁸

26
- 0001682206
- L. Cheng, G. Zhang, D. Yu, and Z. Zhang, Appl. Phys. Lett. 70, 1408 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1408
- Cheng, L.¹ Zhang, G.² Yu, D.³ Zhang, Z.⁴

27
- 0001408312
- M. S. Yi, H. H. Lee, D. J. Kim, S. J. Park, D. Y. Noh, C. C. Kim, and J. H. Je, Appl. Phys. Lett. 75, 2187 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 2187
- Yi, M.S.¹ Lee, H.H.² Kim, D.J.³ Park, S.J.⁴ Noh, D.Y.⁵ Kim, C.C.⁶ Je, J.H.⁷

28
- 0000369868
- A. Munkholm, C. Thomson, C. M. Foster, J. A. Eastman, O. Auciello, P. Fini, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 72, 2972 (1998).
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2972
- Munkholm, A.¹ Thomson, C.² Foster, C.M.³ Eastman, J.A.⁴ Auciello, O.⁵ Fini, P.⁶ DenBaars, S.P.⁷ Speck, J.S.⁸

29
- 0000874390
- L. Sugiura, K. Itaya, J. Nishio, H. Fujimoto, and Y. Kokubun, J. Appl. Phys. 82, 4877 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 4877
- Sugiura, L.¹ Itaya, K.² Nishio, J.³ Fujimoto, H.⁴ Kokubun, Y.⁵

30
- 0018986239
- D. E. Aspnes, J. Vac. Sci. Technol. 18, 289 (1981).
- (1981) J. Vac. Sci. Technol. , vol.18 , pp. 289
- Aspnes, D.E.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.