Hydrogen-implant induced exfoliation of silicon and other crystals

Applied Physics Letters

Volumn 71, Issue 24, 1997, Pages 3519-3521

  Varma, C M ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001157714     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120378     Document Type: Article

References (11)

1. A. J. Auberton-Herve, J. M. Lamure, T. Barge, M. Bruel, B. Aspar, and J. L. Pelloie, Semicond. Int. II, 97 (1995); M. Bruel, Electron. Lett. 31, 1201 (1995); B. Aspar, T. Poumeyrol, H. Moriceau, and M. Bruel, Proceedings of the Seventh International Symposium on Silicon on Insulator Materials, edited by P. L. F. Hemment, S. Christolorenau, K. Izumi, T. Houston, and S. Wilson (The Electrochemical Society, Pennington, NJ 1996), Vol. 96-3, p. 34.
2. A. J. Auberton-Herve, J. M. Lamure, T. Barge, M. Bruel, B. Aspar, and J. L. Pelloie, Semicond. Int. II, 97 (1995); M. Bruel, Electron. Lett. 31, 1201 (1995); B. Aspar, T. Poumeyrol, H. Moriceau, and M. Bruel, Proceedings of the Seventh International Symposium on Silicon on Insulator Materials, edited by P. L. F. Hemment, S. Christolorenau, K. Izumi, T. Houston, and S. Wilson (The Electrochemical Society, Pennington, NJ 1996), Vol. 96-3, p. 34.
3. A. J. Auberton-Herve, J. M. Lamure, T. Barge, M. Bruel, B. Aspar, and J. L. Pelloie, Semicond. Int. II, 97 (1995); M. Bruel, Electron. Lett. 31, 1201 (1995); B. Aspar, T. Poumeyrol, H. Moriceau, and M. Bruel, Proceedings of the Seventh International Symposium on Silicon on Insulator Materials, edited by P. L. F. Hemment, S. Christolorenau, K. Izumi, T. Houston, and S. Wilson (The Electrochemical Society, Pennington, NJ 1996), Vol. 96-3, p. 34.
4. M. K. Weldon, Surf. Sci. 368, 163 (1996); M. Weldon, V. E. Marsico, Y. J. Chabal, A. Agarwal, D. J. Eaglesham, J. Spajeta, W. I. Brown, D. C. Jacobson, Y. Caudano, S. B. Christman, and E. E. Chaban, J. Vac. Sci. Technol. B 15, 1065 (1997).
5. M. K. Weldon, Surf. Sci. 368, 163 (1996); M. Weldon, V. E. Marsico, Y. J. Chabal, A. Agarwal, D. J. Eaglesham, J. Spajeta, W. I. Brown, D. C. Jacobson, Y. Caudano, S. B. Christman, and E. E. Chaban, J. Vac. Sci. Technol. B 15, 1065 (1997).
6. Q.-Y. Tong, T. H. Lee, K. Gutjahr, S. Hopfe, and U. Gosele, Appl. Phys. Lett. 70, 1390 (1997).
7. For a review with a long list of references, see B. M. U. Scherzer, in Sputtering by Particle Bombardment II, edited by R. Behrisch (Springer, Berlin, 1983).
8. L. D. Landau and E. M. Lifshitz, Theory of Elasticity (Addison-Wesley, Reading, MA, 1959), Eq. (9.8).
9. K. Raghavachari (private communications).
10. See for example, B. R. Lawn and T. R. Wilshaw, Fracture of Brittle Solids (Cambridge University Press, Cambridge, 1975).
11. S. L. B. Freund (unpublished).