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Volumn 36, Issue 1, 1997, Pages 319-327

Influence of incoherent superposition of light on ellipsometric coefficients

Author keywords

Incoherent superposition; Refractive index of thin films; Spectroscopic ellipsometry; Transmittance ellipsometry

Indexed keywords


EID: 0005807653     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.000319     Document Type: Article
Times cited : (53)

References (11)
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    • Roseler, A.1
  • 4
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    • Spectroscopic transmission ellipsometry studies of semiconductor heterostructures
    • K. B. Ozanyan and O. Hunderi, “Spectroscopic transmission ellipsometry studies of semiconductor heterostructures,” Physica Status Solidi A207, 420-426 (1994).
    • (1994) Physica Status Solidi A , vol.207 , pp. 420-426
    • Ozanyan, K.B.1    Hunderi, O.2
  • 5
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    • Recherches sur la propagation des ondes électromagnétique sinussoidales dans les milieux stratifies. Application aux couches minces
    • F. Abeles, “Recherches sur la propagation des ondes électromagnétique sinussoidales dans les milieux stratifies. Application aux couches minces.” Ann. Phys.5, 596-640 (1950).
    • (1950) Ann. Phys , vol.5 , pp. 596-640
    • Abeles, F.1
  • 6
    • 0027682165 scopus 로고
    • Jr., “Data analysis for spectroscopic ellipsometry
    • G. E. Jellison, Jr., “Data analysis for spectroscopic ellipsometry,” Thin Solid Films234, 416-422 (1993).
    • (1993) Thin Solid Films , vol.234 , pp. 416-422
    • Jellison, G.E.1
  • 9
    • 43949165760 scopus 로고
    • Broadband spectroscopic ellipsometry based on a Fourier transform spectrometer
    • A. Gombert, M. Kohl, and U. Weimar, “Broadband spectroscopic ellipsometry based on a Fourier transform spectrometer,” Thin Solid Films234, 352-355 (1993).
    • (1993) Thin Solid Films , vol.234 , pp. 352-355
    • Gombert, A.1    Kohl, M.2    Weimar, U.3
  • 11
    • 34547217759 scopus 로고
    • Optical constants of thenoble metals
    • P. B. Johnson and R. W. Christy, “Optical constants of thenoble metals,” Phys. Rev. B 6,(12), 4370-4379 (1972).
    • (1972) Phys. Rev. B , vol.6 , Issue.12 , pp. 4370-4379
    • Johnson, P.B.1    Christy, R.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.