Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants

Nanotechnology

Volumn 15, Issue 11, 2004, Pages 1561-1570

  Tambe, Nikhil S ^a   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATMOSPHERIC HUMIDITY; COATING TECHNIQUES; ELECTROSTATICS; FRICTION; LUBRICANTS; NANOSTRUCTURED MATERIALS; SURFACE ROUGHNESS;

ELECTROSTATIC ATTRACTION; FRICTION FORCE; SCALE DEPENDENCE;

MICROELECTROMECHANICAL DEVICES;

EID: 9744281904     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/11/033     Document Type: Article

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