Thin-film bulk-acoustic-resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes

IEEE Transactions on Electron Devices

Volumn 55, Issue 5, 2008, Pages 1237-1243

  Penza, Michele ^a   Aversa, Patricia ^a   Cassano, Gennaro ^a   Suriano, Domenico ^a   Wlodarski, Wojtek ^b   Benetti, Massimiliano ^c   Cannatà, Domenico ^c   Di Pietrantonio, Fabio ^c   Verona, Enrico ^c  

^a ENEA   (Italy)

^b RMIT UNIVERSITY   (Australia)

^c CNR Consiglio Nazionale delle Ricerche   (Italy)

Author keywords

Gas sensor; Langmuir Blodgett (LB) nanocomposite film; Single walled carbon nanotubes (SWCNTs); Thin film bulk acoustic resonator (TFBAR)

Indexed keywords

ACOUSTIC RESONATORS; CARBON NANOTUBES; LANGMUIR BLODGETT FILMS; SEMICONDUCTING SILICON; SUBSTRATES;

LANGMUIR-BLODGETT (LB) NANOCOMPOSITE FILM; SILICON SUBSTRATE; SINGLE-WALLED CARBON NANOTUBES (SWCNTS); THIN-FILM BULK ACOUSTIC RESONATOR (TFBAR);

CHEMICAL SENSORS;

EID: 43749084169     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2008.919283     Document Type: Article

References (18)

1. R. Ruby, P. Bradley, D. Clark, D. Feld, T. Jamneala, and K. Wang, "Acoustic FBAR for filters, duplexers and front end modules," in Proc. IEEE Microw. Symp. Dig., 2004, vol. 2, pp. 931-934.
2. W. Pang, H. Yu, H. Zhang, and E.-S. Kim, "Temperature-compensated film bulk acoustic resonator above 2 GHz," IEEE Electron Device Lett., vol. 26, no. 6, pp. 369-371, Jun. 2005.
3. M. Benetti, D. Cannatà, F. Di Pietrantonio, V. Foglietti, and E. Verona, "Microbalance chemical sensor based on thin-film bulk acoustic wave resonators," Appl. Phys. Lett., vol. 87, no. 17, p. 173-504, Oct. 2005.
4. S. Rey-Mermet, R. Lanz, and P. Muralt, "Bulk acoustic wave resonator operating at 8 GHz for gravimetric sensing of organic films," Sens. Actuators B, Chem., vol. 114, no. 2, pp. 681-686, Apr. 2006.
5. H. Zhang and E.-S. Kim, "Micromachined acoustic resonator mass sensor," J. Microelectromech. Syst., vol. 14, no. 4, pp 699-706, Aug. 2005.
6. M. Link, M. Schreiter, J. Weber, R. Primig, D. Pitzer, and R. Gabl, "Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids," IEEE Trans. Ultrason., Ferroelectr., Freq. Control, vol. 53, no. 2, pp. 492-496, Feb. 2006.
7. M. Benetti, D. Cannatà, A. D'Amico, F. Di Pietrantonio, V. Foglietti, and E. Verona, "Thin film bulk acoustic wave resonator (TFBAR) gas sensor," in Proc. IEEE Int. Ultrason., Ferroelectr., Freq. Control 2004, vol. 2, pp. 1581-1584.
8. H.-M. Lee, H.-T. Kim, H.-K. Choi, H.-C. Lee, H.-K. Hong, D.-H. Lee, J.-U. Bu, and E. Yoon, "A highly-sensitive differential-mode microchemical sensor using TFBARs with on-chip microheater for volatile organic compound (VOC) detection," in Proc. MEMS, 2006, vol. 1, pp. 490-493.
9. J. Weber, W.-M. Albers, J. Tuppurainen, M. Link, R. Gabl, W. Wersing, and M. Schreiter, "Shear mode FBARs as highly sensitive liquid biosensors," Sens. Actuators A, Phys., vol. 128, no. 1, pp. 84-88, Mar. 2006.
10. R. Gabl, H.-D. Feucht, H. Zeininger, G. Eckstein, M. Schreiter, R. Primig, D. Pitzer, and W. Wersing, "First results on label-free detection of DNA and protein molecules using a novel integrated sensor technology based on gravimetric detection principles," Biosens. Bioelectron., vol. 19, no. 6, pp. 615-620, Jan. 2004.
11. M. Penza, M. A. Tagliente, P. Aversa, M. Re, and G. Cassano, "The effect of purification of single-walled carbon nanotube bundles on the alcohol sensitivity of nanocomposite Langmuir-Blodgett films for SAW sensing applications," Nanotechnology, vol. 18, no. 18, p. 185-502, May 2007.
12. M. Penza, M. A. Tagliente, P. Aversa, G. Cassano, and L. Capodieci, "Single-walled carbon nanotubes nanocomposite microacoustic organic vapor sensors," Mater. Sci. Eng., C, vol. 26, no. 5-7, pp. 1165-1170, Jul. 2006.
13. M. Penza, M. A. Tagliente, P. Aversa, and G. Cassano, "Organic-vapor detection using carbon-nanotubes nanocomposite microacoustic sensors," Chem. Phys. Lett., vol. 409, no. 4-6, pp. 349-354, Jun. 2005.
14. S. Saravanan, E. Berenschot, G. Krijnen, and M. Elwenspoek, "A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators," Sens. Actuators A, Phys., vol. 130/131, no. 1, pp. 340-345, Aug. 2006.
15. F. Picaud, R. Langlet, M. Arab, M. Devel, C. Girardet, S. Natarajan, S. Chopra, and A. M. Rao, "Gas-induced variation in the dielectric properties of carbon nanotube bundles for selective sensing," J. Appl. Phys., vol. 97, no. 11, p. 114-316, Jun. 2005.
16. 2 detection using carbon nanotube networks and micromachined resonant transducers," Appl. Phys. Lett., vol. 86, no. 20, p. 203-112, May 2005.
17. S. Chopra, A. Pham, J. Gaillard, A. Parker, and A. M. Rao, "Carbon-nanotube-based resonant-circuit sensor for ammonia," Appl. Phys. Lett., vol. 80, no. 24, pp. 4632-4634, Jun. 2002.
18. R. J. Chen, N. R. Franklin, J. Kong, J. Cao, T. W. Tombler, Y. Zhang, and H. Dai, "Molecular photodesorption from single-walled carbon nanotubes," Appl. Phys. Lett., vol. 79, no. 14, pp. 2258-2260, Oct. 2001.