Ultra-thin-film AlN contour-mode resonators for sensing applications

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2009, Pages 714-717

  Rinaldi, Matteo ^a   Zuniga, Chiara ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

AlN contour mode resonators; Gravimetric sensors; Sensitivity; Ultra thin film AlN

Indexed keywords

ELECTROMECHANICAL DEVICES; III-V SEMICONDUCTORS; MEMS; NATURAL FREQUENCIES; RESONATORS; ULTRATHIN FILMS;

ALUMINUM NITRIDE (ALN); CONTOUR-MODE RESONATORS; EXPERIMENTAL VERIFICATION; GRAVIMETRIC SENSORS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); RESONANCE FREQUENCIES; SENSING APPLICATIONS; SENSITIVITY;

ALUMINUM NITRIDE;

EID: 77952850594     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2009.5441939     Document Type: Conference Paper

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