Uncooled IR imaging array based on quartz microresonators

Journal of Microelectromechanical Systems

Volumn 5, Issue 2, 1996, Pages 131-137

  Vig, John R ^a,b,d,e   Filler, Raymond L ^{a,b,c,e,f,g,h}   Kim, Yoonkee ^b,i,j,k,l,m  

^a IEEE

^b U S ARMY RESEARCH LABORATORY   (United States)

^c US Army Communications and Electronics Command   (United States)

^d CITY COLLEGE OF NEW YORK   (United States)

^e RUTGERS UNIVERSITY   (United States)

^f RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^g U S ARMY   (United States)

^h Rensselaer Polytechnic Institute ^*

ⁱ Seoul National University   (South Korea)

^j Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^k GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^l LG Electronics Inc   (South Korea)

^m Microlectron Research Center of GIT

more..

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL OSCILLATORS; ELECTRIC FREQUENCY CONTROL; INFRARED DETECTORS; INFRARED IMAGING; LIGHT ABSORPTION; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS; THERMAL EFFECTS;

INFRARED IMAGING ARRAY; INFRARED SENSORS; QUARTZ MICRORESONATORS; SEMICONDUCTOR MICROFABRICATION; SENSOR ARRAYS; SINGLE QUARTZ WAFER; TEMPERATURE CHANGES; THERMAL ISOLATION; THERMAL MASS;

CRYSTAL RESONATORS;

EID: 0030170410     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.506201     Document Type: Article

References (43)

1. F. L. Walls and J. R. Vig, "Fundamental limits on the frequency stabilities of crystal oscillators," IEEE Trans. Ultrason., Ferroelect. Freq. Contr., vol. 42, pp. 576-589, 1995.
2. V. E. Bottom, Introduction to Quartz Crystal Unit Design. New York: Van Nostrand Reinhold, 1982.
3. E. A. Gerber and A. Ballato, Eds., Precision Frequency Control. New York: Academic, 1985.
4. E. P. EerNisse, R. W. Ward, and R. B. Wiggins, "Survey of quartz bulk resonator sensor technologies," IEEE Trans. Ultrason., Ferroelect. Freq. Contr., vol. 35, pp. 323-330, 1988.
5. J. R. Vig, J. W. LeBus, and R. L. Filler, "Chemically polished quartz," in Proc. 31st Ann. Symp. on Frequency Control, 1977, pp. 131-143.
6. J. R. Hunt and R. C. Smythe, "Chemically milled VHF and UHF AT-cut resonators," in Proc. 39th Ann. Frequency Control Symp., 1985, pp. 292-300.
7. P. W. Kruse, "A comparison of the limits to the performance of thermal and photon detector imaging arrays," Infrared Phys. Technol., vol. 36, pp. 869-882, 1995.
8. R. A. Heising, Quartz Crystals for Electrical Circuits. New York: Van Nostrand, 1946, pp. 26-27.
9. -6°C range," Rev. Sci. Instr., vol. 34, pp. 268-70, 1963.
10. D. L. Hammond, C. A. Adams, and P. Schmidt, "A linear, quartz crystal, temperature sensing element," ISA Trans., vol. 4, pp. 349-354, 1965.
11. H. Ziegler and J. Tiesmeyer, "Digital sensor for IR radiation," Sens. Actuators, vol. 4, pp. 363-367, 1983.
12. J. A. Kusters, M. C. Fisher, and J. G. Leach, "Dual mode operation of temperature and stress compensated crystals," in Proc. 32nd Ann. Symp. Frequency Control, 1978, pp. 389-397.
13. R. L. Filler and J. R. Vig, "Resonators for the microcomputer compensated crystal oscillator," in Proc. 43rd Ann. Symp. Frequency Control, 1989, pp. 8-15.
14. M. Nakazawa, H. Yamaguchi, A. D. Ballato, and T. J. Lukaszek, "Stress-compensated quartz resonators having ultralinear frequency-temperature responses," in Proc. 38th Ann. Frequency Control Symp., 1984, pp. 240-244.
15. B. Sinha, "Stress compensated orientation for thickness shear quartz resonators," in Proc. 35th Ann. Frequency Control Symp., 1981, pp. 213-221.
16. G. K. Montress and T. E. Parker, private communication, 1995; and "Design and performance of an extremely low noise surface acoustic wave oscillator," in Proc. 1994 IEEE Frequency Control Symp., 1994, pp. 365-373.
17. G. K. Montress and T. E. Parker, private communication, 1995; and "Design and performance of an extremely low noise surface acoustic wave oscillator," in Proc. 1994 IEEE Frequency Control Symp., 1994, pp. 365-373.
18. M. M. Driscoll and W. P. Hanson, "Measured vs. volume model-predicted flicker-of-frequency instability in VHF quartz crystal resonators," in Proc. 1993 IEEE Int. Frequency Control Symp., 1993, pp. 186-192.
19. F. Walls, "A new model of 1/f noise in BAW quartz resonators," in Proc. 1992 IEEE Int. Frequency Control Symp., 1992, pp. 327-333.
20. Y. K. Yong and J. R. Vig, "Resonator surface contamination-A cause for frequency fluctuations?," in Proc. 42nd Ann. Frequency Control Symp., 1988, pp. 397-403.
21. J. R. Vig, R. L. Filler, and Y. Kim, "Microresonator sensor arrays," in Proc. 1995 IEEE Int. Frequency Control Symp., 1995, pp. 852-869.
22. T. E. Parker, NIST, private communication, 1994.
23. F. L. Walls, NIST, private communication, 1994.
24. S. Kumar and D. Cho, "Electrostatically levitated microactuators," J. Micromech. Microeng, vol. 2, pp. 96-103, 1992.
25. K. C. Lee, "The fabrication of thin, freestanding, single-crystal, semiconductor membranes," J. Electrochem. Soc., vol. 137, pp. 2556-2574, 1990.
26. W. G. Spitzer and D. A. Kleiman, "Infrared lattice bands of quartz," Physical Rev., vol. 121, pp. 1324-1335, 1961.
27. E. D. Palik, Handbook of Optical Constants of Solids, vol. 1. Orlando, FL: Academic, 1985.
28. L. N. Hadley and D. M. Dennison, "Reflection and transmission interference filters," J. Opt. Soc. Am., vol. 37, pp. 451-465, 1947.
29. W. Lang, K. Kühl and H. Sandmaier, "Absorbing layers for thermal infrared detectors," in Transducers '91, Int. Conf. Solid-State Sensors and Actuators, Dig. Tech. Papers, 1991, pp. 635-638, Sens. Actuators A, vol. 34, pp. 243-248, 1992.
30. W. Lang, K. Kühl and H. Sandmaier, "Absorbing layers for thermal infrared detectors," in Transducers '91, Int. Conf. Solid-State Sensors and Actuators, Dig. Tech. Papers, 1991, pp. 635-638, Sens. Actuators A, vol. 34, pp. 243-248, 1992.
31. K. C. Liddiard, "Application of interferometric enhancement to self-absorbing thin film thermal IR detectors," Infrared Phys., vol. 34, pp. 379-387, 1993.
32. O. S. Havens, Optical Properties of Thin Solid Films. London, UK: Butterworth, 1955, chs. 4, 6.
33. H. F. Tiersten, private communication, 1995.
34. R. C. Smythe, private communication, 1995.
35. A. D. Ballato, E. R. Hatch, M. Mizan, T. J. Lukaszek, and R. Tilton, "Simple thickness plate modes driven by lateral fields," in Proc. 39th Ann. Symp. Frequency Control, 1985, pp. 462-472.
36. R. J. Besson, "A new 'electrodeless' resonator design," in Proc. 31st Ann. Symp. Frequency Control, 1977, pp. 147-152.
37. R. A. Wood, "Uncooled thermal imaging with monolithic silicon focal plane arrays," in Proc. SPIE 2020, Infrared Technology XIX, 1993, pp. 322-329.
38. C. M. Hanson, "Uncooled ferroelectric thermal imaging," in Proc. SPIE 2020, Infrared Technology XIX, 1993, pp. 330-339.
39. R. A. Wood and N. A. Foss, "Micromachined bolometers achieve low-cost imaging," Laser Focus World, pp. 101-106, June 1993.
40. R. Demeis, "Select the appropriate camera for your application," Laser Focus World, pp. 105-112, July 1995.
41. T. Payne and J. Staudte, private communication, June 1995.
42. P. W. Kruse, L. D. McGlauchlin, and R. B. McQuistan, Elements of Infrared Technology. New York: Wiley, 1962.
43. H. F. Tiersten, "The influence of an asymmetric air gap on the vibration characteristics of quartz trapped energy resonators," in Proc. IEEE Int. Frequency Control Symp., 1995, pp. 740-745.