Micro Thermoelectric Generators

Micro Energy Harvesting

Volumn , Issue , 2015, Pages 245-269

  Stark, Ingo ^a  

^a Perpetua Power Source Technologies Inc   (United States)

Author keywords

Bi2Te3; Body heat; Bulk; CMOS; Cross plane; Enocean; Film; Foil; Heat; Heat energy; Heat flow; Heat sink; Heat source; Human body; IMEC; In plane; Laird; MEMS; Micropelt; MicroTEG; Nextreme; Perpetua; Seebeck; TC; TEG; Temperature; Temperature difference; Temperature gradient; Thermal; Thermal conductivity; Thermal resistance; Thermocouple; Thermoelectric; Thermoelectric generator; Thermogen; Thermopile; Thin film; V2VI3; Waste heat; Wearable; ZT

Indexed keywords

BISMUTH COMPOUNDS; CMOS INTEGRATED CIRCUITS; ELECTRON DEVICES; FILMS; HEAT RESISTANCE; HEAT SINKS; HEAT TRANSFER; HEATING; MEMS; METAL FOIL; PACKAGING MATERIALS; SCREEN PRINTING; TECHNETIUM; TEMPERATURE; THERMAL GRADIENTS; THERMOCOUPLES; THERMOELECTRIC ENERGY CONVERSION; THERMOELECTRIC EQUIPMENT; THERMOPILES; THIN FILMS; VAN DE GRAAFF GENERATORS; WASTE HEAT; WEARABLE TECHNOLOGY;

BI2TE3; BODY HEATS; BULK; CROSS PLANES; ENOCEAN; HEAT ENERGY; HEAT SOURCES; HUMAN BODIES; IMEC; LAIRD; MICROPELT; MICROTEG; NEXTREME; PERPETUA; SEEBECK; TEMPERATURE DIFFERENCES; THERMAL; THERMO-ELECTRIC GENERATORS; THERMOELECTRIC; THERMOGENS; V2VI3; WEARABLE;

THERMAL CONDUCTIVITY;

EID: 85016497751     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527672943.ch12     Document Type: Chapter

References (71)

1. Google http://scholar.google.com (accessed 10 January 2014).
2. U.S. Environmental Protection Agency, http://www.epa.gov/superfund/students/ clas_act/haz-ed/ff06.pdf (accessed 15 January 2014).
3. Research and Markets Wearable Electronics Market and Technology Analysis (2013-2018) by Components, Applications, Products, e-Materials & Geography, http://www.researchandmarkets.com/ publication/acd4s1/wearable_ electronics_market_and_technology_an (accessed 15 January 2014).
4. Zervos, H. (2013) Thermoelectric Energy Harvesting 2013-2023: Devices, Applications, Opportunities, IDTechEx, Cambridge, MA.
5. Abowitz, G., Klints, V., Lancaster, E., Levy, M., and Mountvala, A. (1965) Thin film thermoelectrics (Thin films of thermoelectric alloys formed with vacuum evaporation technique). Semicond. Prod. Solid State Technol., 8 18-22.
6. Rowe, D.M., Morgan, D.V., and Kiely, J.H. (1989) Miniature low-power/highvoltage thermoelectric generator. Electron. Lett., 25 (2), 166-168.
7. Rowe, D.M. (ed) (1995) Miniature semiconductor thermoelectric devices, in CRC Handbook of Thermoelectrics, vol. 35, CRC Press, London.
8. Bulova Thermatron http://www. hknebel.org/Uhren/Hersteller/Bulova/ Thermatron/Bulova_Thermatron/ bulova_thermatron.html (accessed 15 January 2014).
9. Kishi, M., Nemoto, H., Hamao, T., Yamamoto, M., Sudou, S., Mandai, M., and Yamamoto, S. (1999) Microthermoelectric modules and their application to wrist-watches as an energy source. Proceeding of the 18th International Conference on Thermoelectrics, Baltimore, MD, 1999.
10. USGS http://minerals.usgs.gov/ds/2005/ 140/tellurium.xls (accessed 15 January 2014).
11. Glatz,W., Schwyter, E., Durrer, L., and Hierold, C. (2009) Bi2Te3-based flexible micro thermoelectric generator with optimized design. J. Micromech. Systems, 18(3), 763-772.
12. Böttner, H. and Nurnus, J. (2012) Miniaturized thermoelectric converters, technologies, and applications, in Modules, Systems, and Applications in Thermoelectrics, vol. 17 (ed D.M. Rowe), CRC Press, Boca Raton, FL.
13. Micropelt http://www.micropelt.com/ downloads/thermo_generator_package. pdf (accessed 15 January 2014).
14. Snyder, G.J., Lim, J.R., Huang, C.-K., and Fleurial, J.-P. (2003) Thermoelectric microdevice fabricated by a MEMS-like electrochemical process. Nat. Mater., 2, 528-533.
15. Semenyuk, V. (2001) Thermoelectric micro modules for spot cooling of high density heat sources. Proceeding of the 20th International Conference Thermoelectrics, Beijing, P. R. China.
16. Navone, C., Soulier, M., Testard, J., Simon, J., and Caroff, T. (2011) Optimization and fabrication of a thick printed thermoelectric device. J. Electron. Mater., 40 (5), 789-793.
17. Venkatasubramanian, R. et al. (2012) Thin-film superlattice thermoelectric devices for energy harvesting and thermal management, in Modules, Systems, and Applications in Thermoelectrics, vol. 21(ed D.M. Rowe), Boca Raton, FL, CRC Press.
18. Laird http://www.lairdtech.com/ brandworld/library/THR-DS-eTECHV56% 200512.pdf.
19. Harman, T.C., Reeder, R.E., Walsh, M.P., LaForge, B.E., Hoyt, C.D., and Turner, G.W. (2006) High electrical power density from PbTe-based quantum-dot superlattice unicouple thermoelectric devices. Appl. Phys. Lett., 88 (24), 243504.
20. Wang, W., Jia, F., Huang, Q., and Zhang, J. (2005) A new type of low power thermoelectric micro-generator fabricated by nanowire array thermoelectric material. Microelectron. Eng., 77 (3), 223-229.
21. Stark, I. & Stordeur, M. (1999) New micro thermoelectric devices based on bismuth telluride-type thin solids films. Proceeding of the 18th International Conference Thermoelectrics, Baltimore, MD.
22. Stark, I. (2006) Thermal energy harvesting with Thermo Life. Proceeding of the International Workshop on Wearable and Implantable Body Sensor Networks, BSN 2006, Cambridge, MA.
23. Thermogen http://www.thermogentech. com (accessed 25 December 2014).
24. Suzuki, T., Yoshikawa, K., and Momose, S. (2010) Integration of organic photovoltaic and thermoelectric hybrid module. IEEE International Electron Devices Meeting, San Francisco, CA, December 6-8, 2010.
25. Xie, J., Lee, C., and Feng, H. (2010) Design, fabrication, and characterization of CMOS MEMS-based thermoelectric power generators. J. Micromech. Systems, 19(2), 317-324.
26. Yang, M.-Z., Chyan-Chyi, W., Dai, C.-L., and Tsai, W.-J. (2013) Energy harvesting thermoelectric generators manufactured using the complementary metal oxide semiconductor process. Sensors, 13, 2359-2367.
27. Weber, J., Potje-Kamloth, K., Haase, F., Detemple, P., Völklein, F., and Doll, T. (2006) Coin-size coiled-up polymer foil thermoelectric power generator for wearable electronics. Sens. Actuators, A, 132, 325-330.
28. Yadav, A., Pipe, K.P., and Shtein, M. (2008) Fiber-based flexible thermoelectric power generator. J. Power Sources, 175(2), 909-913.
29. Strasser, M., Aigner, R., Lauterbach, C., Sturm, T.F., Franosch, M., and Wachutka, G. (2004) Micromachined CMOS thermoelectric generators as on-chip power supply. Sens. Actuators, A, 114 (2), 362-370.
30. Strasser, M., Aigner, R., Franosch, M., and Wachutka, G. (2002) Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining. Sens. Actuators, A, 97-98, 535-542.
31. Kao, P.H., Shih, P.J., Dai, C.L., and Liu, M.C. (2010) Fabrication and characterization of CMOS-MEMS thermoelectric micro generators. Sensors, 10 (2), 1315-1325.
32. Francioso, L., De Pascali, C., Siciliano, P., De Risi, A., D'Amico, S., Veri, C., and Pasca, M. (2013) Thin film technology flexible thermoelectric generator and dedicated ASIC for energy harvesting applications. 5th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI), 2013.
33. Kim, I.H. and Lee, D.H. (1996) Thin film thermoelectric generator cell of Bi-Sb-Te-Se system. 15th International Conference on Thermoelectrics.
34. Takashiri, M., Shirakawa, T., Miyazaki, K., and Tsukamoto, H. (2007) Fabrication and characterization of bismuth-telluride-based alloy thin film thermoelectric generators by flash evaporation method. Sens. Actuators, A, 138(2), 329-334.
35. Yang, S.M., Cong, M., and Lee, T. (2011) Application of quantum well-like thermocouple to thermoelectric energy harvester by BiCMOS process. Sens. Actuators, A, 166 (1), 117-124.
36. Itoigawa, K., Ueno, H., Shiozaki, M., Toriyama, T., and Sugiyama, S. (2005) Fabrication of flexible thermopile generator. J. Micromech. Microeng., 15 (9), 233-238.
37. Hasebe, S., Ogawa, J., Shiozaki, M., Toriyama, T., Sugiyama, S., Ueno, H., and Itoigawa, K. (2004) Polymer based smart flexible thermopile for power generation. 17th IEEE International Conference on MEMS, 2004.
38. Pelegrini, S., Adami, A., Collini, C., Conci, P., Lorenzelli, L., and Pasa, A.A. (2003) Simulation, design and fabrication of a planar micro thermoelectric generator. SPIE Microtechnologies, International Society for Optics and Photonics, May, 2013, p. 876322.
39. Carmo, J.P., Gonçalves, L.M., and Correia, J.H. (2010) Thermoelectric microconverter for energy harvesting systems. IEEE Trans. Ind. Electron., 57 (3), 861-867.
40. Huesgen, T., Woias, P., and Kockmann, N. (2008) Design and fabrication of MEMS thermoelectric generators with high temperature efficiency. Sens. Actuators, A, 145, 423-429.
41. Glosch, H., Ashauer, M., Pfeiffer, U., and Lang, W. (1999) A thermoelectric converter for energy supply. Sens. Actuators, A, 74 (1), 246-250.
42. Leonov, V., van Andel, Y., Wang, Z., Vullers, R.J.M., and Van Hoof, C. (2011) Micromachined polycrystalline Si thermopiles in a T-shirt. Sens. Trans. J., 127 (4), 15-26.
43. Jacquot, A., Liu, W.L., Chen, G., Fleurial, J.P., Dauscher, A., and Lenoir, B. (2002) Fabrication and modeling of an in-plane thermoelectric micro-generator. Proceeding 21st International Conference on Thermoelectrics, 2002.
44. Chen, G.M., Huang, I.Y., Ma, L.Y., & Wu, T.E. (2011) Development of a novel transparent micro-thermoelectric generator for solar energy conversion. IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2011.
45. Schaevitz, S.B., Franz, A.J., Jensen, K.F., and Schmidt, M. A. (2001) A combustion-based MEMS thermoelectric power generator. Proceeding of the 11th International Conference Solid- State Sensors and Actuators, Munich, Germany, 2001.
46. Wang, Z., Leonov, V., Fiorini, P., and Van Hoof, C. (2009) Realization of a wearable miniaturized thermoelectric generator for human body applications. Sens. Actuators, A, 156 (1), 95-102.
47. Su, J., Leonov, V., Goedbloed, M., van Andel, Y., de Nooijer, M.C., Elfrink, R., Wang, Z., and Vullers, R.J.M. (2010) Batch process micromachined thermoelectric energy harvester: fabrication and characterization. J. Micromech. Microeng., 20, 104005 (6pp).
48. Chen, A., Madan, D., Wright, P.K., and Evans, J.W. (2011) Dispenser-printed planar thick-film thermoelectric energy generators. J. Micromech. Microeng., 21, 104006(8pp).
49. Stordeur, M. and Stark, I. (1997) Low power thermoelectric generator-selfsufficient energy supply for micro systems. Proceeding of the 16th International Conference on Thermoelectrics, Dresden, Germany, 1997.
50. Leonov, V. and Fiorini, P. (2007) Thermal matching of a thermoelectric energy scavenger with the ambience. Proceeding of the 5th European Conference Thermoelectrics (ECT 07), 2007.
51. Leonov, V. (2011) Energy harvesting for self-powered wearable devices, in Wearable Monitoring Systems (eds A. Bonfiglio and D. De Rossi), Springer Science, Business Media, LLC, pp. 27-49.
52. Chen, A. and Wright, P.K. (2012) Medical applications of thermoelectrics, in Modules, Systems, and Applications in Thermoelectrics, vol. 26 (ed D.M. Rowe), CRC Press, Boca Raton, FL.
53. Wojtas, N., Schwyter, E., Glatz, W., Kühne, S., Escher, W., and Hierold, C. (2012) Power enhancement of micro thermoelectric generators by microfluidic heat transfer packaging. Sens. Actuators, A, 188, 389-395.
54. Venkatasubramanian, R., Siivola, E., Colpitts, T., and O'Quinn, B. (2001) Thin-film thermoelectric devices with high room-temperature figures of merit. Nature, 413, 597-602.
55. Boulanger, C. (2010) Thermoelectric material electroplating: a historical review. J. Electron. Mater., 39 (9), 1818-1827.
56. Scherrer, H. and Scherrer, S. (1995) Bismuth telluride, antimony telluride and their solutions, in CRC Handbook of Thermoelectrics, vol. 19 (ed D.M. Rowe), CRC Press, Boca Raton, FL.
57. Lim, J.R., Snyder, G.J., Huang, C.K., Herman, J.A., Ryan, M.A., and Fleurial, J.P. (2002) Thermoelectric microdevice fabrication process and evaluation at the Jet Propulsion Laboratory (JPL). Proceeding of the 21st International Conference Thermoelectrics, Long Beach, CA, 2002.
58. Glatz, W., Durrer, L., Schwyter, E., and Hierold, C. (2008) Novel mixed method for the electrochemical deposition of thick layers of Bi2+xTe3-x with controlled stoichiometry. Electrochim. Acta, 54(2), 755-762.
59. gTEG http://www.greenteg.com/wpcontent/ uploads/gTEG_Technicaloverview. pdf (accessed 15 January 2014).
60. HSG-IMIT http://www.hsg-imit.de/ fileadmin/gfx/Unser_Angebot/F_E_ Dienstleistungen/Sensoren___Systeme/ Thermische_Sensoren/0801_AB_34_ Mikro-Energietechnik_Thermoelektrischer_ Generator_d_e.pdf (accessed 15 January 2014).
61. Hicks, L.D. and Dresselhaus, M.S. (1993) Effect of quantum-well structures on the thermoelectric figure of merit. Phys. Rev. B, 47 (19), 12727-12731.
62. Böttner, H., Schubert, A., Schlereth, K.H., Eberhard, D., Gawrikov, A., Jägle, M., Kühner, G., Künzel, C., Nurnus, J., and Plescher, G. (2004) New thermoelectric components using microsystem- technologies. J. Micromech. Systems, 13 (3), 414-420.
63. Böttner, H., Nurnus, J., and Schubert, A. (2006) Miniaturized thermoelectric converters, in Thermoelectric Handbook: Marcro to Nano, vol. 46 (ed D.M. Rowe), Taylor & Francis Group, Boca Raton, FL.
64. Venkatasubramanian, R. (2001) Thin-film thermoelectric device and fabrication method of same. US Patent 6,300,150.B1, Oct. 9 2001.
65. Magill, P.A. (2008) The Thermal CPB An Approach to Thermal and Power Management, Solid State Technology, http://electroiq.com/blog/2008/01/thethermal- cpb-an-approach-to-thermaland- power-management (accessed 15 January 2014).
66. Eureca http://www.eureca.de/ datasheets/03.xx.xxxx/03.05.xxxx/ 03.05.0001/TEC2L-15-15-5.6_73.pdf (accessed 15 January 2014).
67. Min, G. and Rowe, D.M. (1995) Peltier devices as generators, in CRC Handbook of Thermoelectrics, vol. 38 (ed D.M. Rowe), CRC Press, Boca Raton, FL.
68. Enocean http://www.enocean.com/en/whitepapers/ (accessed 15 January 2014).
69. Leonov, V. and Vullers, R.J.M. (2009) Wearable electronics self-powered by using human body heat: the state of the art and the perspective. J. Renewable Sustainable Energy, 1, 062701.
70. Micropelt http://www.micropelt.com/itrv.php (accessed 15 January 2014).
71. Laird http://www. lairdtech.com/brandworld/library/ Laird-THR-DS-Thermobility- WPG-1-040013.pdf (accessed 25 December 2014).