Miniaturized thermoelectric generators based on poly-Si and poly-SiGe surface micromachining

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 535-542

  Strasser, M ^a,b   Aigner, R ^a   Franosch, M ^a   Wachutka, G ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Figure of merit; Poly Si; Poly SiGe; Surface micromachining; Thermal conductivity; Thermoelectric generator

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; INTEGRATED CIRCUIT LAYOUT; POLYSILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL GRADIENTS; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY;

FIGURE OF MERIT; SURFACE MICROMACHINING; THERMAL EFFICIENCY; THERMOELECTRIC GENERATORS;

ELECTRIC GENERATORS;

EID: 0036544007     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00815-9     Document Type: Conference Paper

References (11)

1. Micro-thermoelectric modules and their application to wrist-watches as an energy source
2. Peltier devices as generators
3. Analysis of a CMOS low power thermoelectric generator
4. Numerical analysis of the effect of geometry on the performance of the Greek cross structure
5. Characterization of the thermal properties of bulk and thin-film materials by using diagnostic microstructures
6. Process-dependent thin-film thermal conductivities for thermal CMOS MEMS
7. Silicon/germanium
8. 30% for thermopiles
9. x films