Fabrication and characterization of CMOS-MEMS thermoelectric micro generators

Sensors

Volumn 10, Issue 2, 2010, Pages 1315-1325

  Kao, Pin Hsu ^a   Shih, Po Jen ^b   Dai, Ching Liang ^a   Liu, Mao Chen ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL UNIVERSITY OF KAOHSIUNG   (Taiwan)

Author keywords

CMOS MEMS; Micro generators; Thermocouples

Indexed keywords

ANISOTROPIC DRY ETCHING; CMOS-MEMS; COMPLEMENTARY METAL OXIDE SEMICONDUCTOR PROCESS; FABRICATION AND CHARACTERIZATIONS; LOW THERMAL CONDUCTIVITY; MICROGENERATORS; TEMPERATURE DIFFERENCES; THERMOELECTRIC MICRO-GENERATOR;

CMOS INTEGRATED CIRCUITS; DRY ETCHING;

THERMOCOUPLES;

METAL; OXIDE; SILICON;

ARTICLE; CHEMISTRY; MICROELECTROMECHANICAL SYSTEM; SEMICONDUCTOR; TEMPERATURE;

METALS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; OXIDES; SEMICONDUCTORS; SILICON; TEMPERATURE;

EID: 77950292806     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s100201315     Document Type: Article

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