Thermoelectric microdevice fabrication process and evaluation at the Jet Propulsion Laboratory (JPL)

International Conference on Thermoelectrics, ICT, Proceedings

Volumn 2002-January, Issue , 2002, Pages 535-539

  Lim, J R ^a   Snyder, G J ^a   Huang, C K ^a   Herman, J A ^a   Ryan, M A ^a   Fleurial, J P ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; COOLING; FABRICATION; INFRARED IMAGING; LIGHT SOURCES; MICROELECTRONICS; PHOTORESISTS; REDUCTION; SEMICONDUCTOR MATERIALS; SILICON OXIDES; WASTE HEAT;

CHARGE COUPLED DEVICE DETECTORS; ELECTROCHEMICAL DEPOSITION; JET PROPULSION LABORATORY; MICROELECTRONICS INDUSTRY; OXIDIZED SILICON SUBSTRATES; POWER MANAGEMENT AND DISTRIBUTIONS; TEMPERATURE DIFFERENTIAL; THERMOELECTRIC CONVERTER;

FIGHTER AIRCRAFT;

EID: 84949775707     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICT.2002.1190373     Document Type: Conference Paper

References (10)

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2. R. Otey and B. Moskowitz, The International Society for Optical Engineering - Oemagazine, Vol. 1, No. 3, 34, (2001).
3. J.-P. Fleurial, G.J. Snyder, J. Patel, C.-K. Huang, M.A. Ryan, R. Averback, C. Hill, and G. Chen, 20th International Conference on Thermoelectrics, Beijing, P.R. China, June (2001).
4. D.-J. Yao, C.-J. Kim, G. Chen, J.-P. Fleurial and H.B. Lyon, 18th International Conference on Thermoelectrics, Baltimore, USA, August 1999, pp 256-259.
5. L. Rushing, A. Shakouri, P. Abraham, and J.E. Bowers, 16th International Conference on Thermoelectrics (1997).
6. J.-P. Fleurial, et al., Thermoelectric Materials 1998, T.M. Tritt, M.G. Kanatzidis, H.B. Lyon, and G.D. Mahan, eds., MRS Volume 545 (1998).
7. J.-P. Fleurial, J.A. Herman, G.J. Snyder, M.A. Ryan, A. Borshchevsky, and C.-K. Huang, Thermoelectric Materials 2000, T.M. Tritt, M.G. Kanatzidis, G. Nolas, and G.D. Mahan, MRS 2002 Spring Meeting Symp. Proc. (2000).
8. J.-P. Fleurial, G.J. Snyder, J.A. Herman, M. Smart, P. Shakkottai, P.H. Giauque, and M.A. Nicolet, Proceedings of the 34th Intersociety Energy Conversion Engineering Conference.. 99-2569 (1999).
9. R.K. Pandey, S.N. Sahu, and S. Chandra, Handbook of Semiconductor Deposition, Ed. M. Dekkar, New York (1996).
10. N.G. Stoltz and G.J. Snyder, 21st International Conference on Thermoelectrics, (2002).