Micromachined CMOS thermoelectric generators as on-chip power supply

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 362-370

  Strasser, Marc ^a   Aigner, Robert ^a   Lauterbach, Christl ^a   Sturm, Thomas F ^a   Franosch, Martin ^a   Wachutka, Gerhard K M ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Power supply; Surface micromachining; Thermal converter; Thermoelectric devices

Indexed keywords

CHIP SCALE PACKAGES; COST ACCOUNTING; ELECTRIC RESISTANCE; GERMANIUM COMPOUNDS; MICROMACHINING; POLYSILICON; POWER SUPPLY CIRCUITS; TEMPERATURE CONTROL; THERMOELECTRICITY; WASTE HEAT;

MICROELECTRONIC DEVICES; SURFACE MICROMACHINING; THERMAL CONVERTER; THERMOELECTRIC GENERATORS;

CMOS INTEGRATED CIRCUITS;

EID: 4344563310     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.11.039     Document Type: Article

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