Fabrication and modeling of an in-plane thermoelectric micro-generator

International Conference on Thermoelectrics, ICT, Proceedings

Volumn 2002-January, Issue , 2002, Pages 561-564

  Jacquot, A ^a   Liu, W L ^b   Chen, G ^b,c   Fleurial, J P ^d   Dauscher, A ^a   Lenoir, B ^a  

^a INSTITUT JEAN LAMOUR   (France)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Massachusetts Institute of Technology   (United States)

^d CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRY; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DEVICE MANUFACTURE; THERMOELECTRICITY;

DIELECTRIC MEMBRANES; ONE-DIMENSIONAL MODEL; REALISTIC GEOMETRY; SEMICONDUCTOR TECHNOLOGY; THERMO-ELECTRIC MATERIALS; THERMOELECTRIC FILM; THERMOELECTRIC MICRO-GENERATOR; WORKING ENVIRONMENT;

VACUUM APPLICATIONS;

EID: 84949808482     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICT.2002.1190380     Document Type: Conference Paper

References (8)

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3. A. Jacquot et al. Figure-of-Merit of fine-grained pofycrystailine silicon thin films, this conference.
4. A. Jacquot et al, Improvements of on-membrane method for thin-film thermal conductivity and emissivity measurement, this conference.
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