Energy harvesting thermoelectric generators manufactured using the complementary metal oxide semiconductor process

Sensors (Switzerland)

Volumn 13, Issue 2, 2013, Pages 2359-2367

  Yang, Ming Zhi ^a   Wu, Chyan Chyi ^b   Dai, Ching Liang ^a   Tsai, Wen Jung ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b TAMKANG UNIVERSITY   (Taiwan)

Author keywords

CMOS; Energy harvesting; Thermocouple; Thermoelectric generator

Indexed keywords

ANISOTROPIC DRY ETCHING; COMPLEMENTARY METAL OXIDE SEMICONDUCTOR PROCESS; FABRICATION AND CHARACTERIZATIONS; SILICON SUBSTRATES; SUSPENDED STRUCTURE; TEMPERATURE DIFFERENCES; THERMOELECTRIC GENERATORS; THERMOELECTRIC MICRO-GENERATOR;

CMOS INTEGRATED CIRCUITS; DRY ETCHING; ENERGY HARVESTING; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY;

THERMOCOUPLES;

EID: 84875179472     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s130202359     Document Type: Article

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