A batch process micromachined thermoelectric energy harvester: Fabrication and characterization

Journal of Micromechanics and Microengineering

Volumn 20, Issue 10, 2010, Pages

  Su, J ^a   Leonov, V ^b   Goedbloed, M ^a   Van Andel, Y ^a   De Nooijer, M C ^a   Elfrink, R ^a   Wang, Z ^a   Vullers, R J M ^a  

^a HOLST CENTRE   (Netherlands)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

6 INCH WAFERS; BATCH PROCESS; BODY AREA NETWORK; COST-EFFECTIVE SOLUTIONS; DIE SIZE; ENERGY HARVESTER; HEAT FLOWS; HUMAN BODIES; MICROMACHINED; OUTPUT POWER; POLY-CRYSTALLINE SILICON; POLY-SIGE; TEMPERATURE DIFFERENCES; THERMOELECTRIC ENERGY; WIRELESS SENSOR NODE;

BATCH DATA PROCESSING; ELECTRIC NETWORK SYNTHESIS; GERMANIUM; HARVESTERS; OPEN CIRCUIT VOLTAGE; POLYSILICON; SEMICONDUCTING SILICON COMPOUNDS; SENSOR NODES; SILICON WAFERS; TELECOMMUNICATION EQUIPMENT; THERMOCOUPLES; THERMOPILES;

ENERGY HARVESTING;

EID: 78049447477     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/10/104005     Document Type: Article

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