-
1
-
-
0031268305
-
Micromachining for optical and optoelectronic systems
-
Nov.
-
M. C. Wu, “Micromachining for optical and optoelectronic systems,” Proc. IEEE, vol. 85, no. 11, pp. 1833–1856, Nov. 1997.
-
(1997)
Proc. IEEE
, vol.85
, Issue.11
, pp. 1833-1856
-
-
Wu, M.C.1
-
2
-
-
0036645839
-
Bulk silicon micromachining for MEMS in optical communication systems
-
M. Hoffmann and E. Voges, “Bulk silicon micromachining for MEMS in optical communication systems,” J. Micromech. Microeng., vol. 12, pp. 349–360, 2002.
-
(2002)
J. Micromech. Microeng.
, vol.12
, pp. 349-360
-
-
Hoffmann, M.1
Voges, E.2
-
3
-
-
3142681592
-
MEMS for optical functionality
-
S. Kim, G. Barbastathis, and H. L. Tuller, “MEMS for optical functionality,” J. Electroceram., vol. 12, pp. 133–144, 2004.
-
(2004)
J. Electroceram.
, vol.12
, pp. 133-144
-
-
Kim, S.1
Barbastathis, G.2
Tuller, H.L.3
-
4
-
-
33847645333
-
Optical MEMS for lightwave communication
-
Dec.
-
M. C. Wu, O. Solgaard, and J. E. Ford, “Optical MEMS for lightwave communication,” J. Lightw. Technol., vol. 24, no. 12, pp. 4433–4454, Dec. 2006.
-
(2006)
J. Lightw. Technol.
, vol.24
, Issue.12
, pp. 4433-4454
-
-
Wu, M.C.1
Solgaard, O.2
Ford, J.E.3
-
5
-
-
0032140199
-
A MEMS-based projection display
-
Aug.
-
P. F. Van Kessel, L. Hornbeck, R. E. Meier, and M. R. Douglass, “A MEMS-based projection display,” Proc. IEEE, vol. 86, no. 8, pp. 1687–1704, Aug. 1998.
-
(1998)
Proc. IEEE
, vol.86
, Issue.8
, pp. 1687-1704
-
-
Van Kessel, P.F.1
Hornbeck, L.2
Meier, R.E.3
Douglass, M.R.4
-
6
-
-
0032665380
-
Thin-film micromirror array (TMA) for high luminance and cost-competitive information display systems
-
Jan.
-
S.-G. Kim, K.-H. Hwang, J.-S. Kim, Y.-J. Choi, and J.-M. Kim, “Thin-film micromirror array (TMA) for high luminance and cost-competitive information display systems,” in Proc. SPIE, Jan. 1999, vol. 3634, pp. 207–216.
-
(1999)
Proc. SPIE
, vol.3634
, pp. 207-216
-
-
Kim, S.-G.1
Hwang, K.-H.2
Kim, J.-S.3
Choi, Y.-J.4
Kim, J.-M.5
-
7
-
-
2342636441
-
Development of a large-scale 3D MEMS optical switch module
-
Oct.
-
T. Yamamoto, J. Yamaguchi, R. Sawada, and Y. Uenishi, “Development of a large-scale 3D MEMS optical switch module,” NTT Tech. Rev., vol. 1, no. 7, pp. 37–42, Oct. 2003.
-
(2003)
NTT Tech. Rev.
, vol.1
, Issue.7
, pp. 37-42
-
-
Yamamoto, T.1
Yamaguchi, J.2
Sawada, R.3
Uenishi, Y.4
-
8
-
-
0942279180
-
Moving reflector type micro optical switch for high-power transfer in a MEMS-based safety and arming system
-
K. R. Cochran, L. Fan, and D. L. DeVoe, “Moving reflector type micro optical switch for high-power transfer in a MEMS-based safety and arming system,” J. Micromech. Microeng., vol. 14, pp. 138–146, 2004.
-
(2004)
J. Micromech. Microeng.
, vol.14
, pp. 138-146
-
-
Cochran, K.R.1
Fan, L.2
DeVoe, D.L.3
-
9
-
-
0033351986
-
Laboratory adaptive optics system for testing the wave front sensor for the new MMT
-
Jul.
-
T. A. Rhoadarmer, P. C. McGuire, J. M. Hughes, M. Lloyd-Hart, J. R. P. Angel, S. Schaller, and M. A. Kenworthy, “Laboratory adaptive optics system for testing the wave front sensor for the new MMT,” in Proc. SPIE, Jul. 1999, vol. 3762, pp. 161–173.
-
(1999)
Proc. SPIE
, vol.3762
, pp. 161-173
-
-
Rhoadarmer, T.A.1
McGuire, P.C.2
Hughes, J.M.3
Lloyd-Hart, M.4
Angel, J.R.P.5
Schaller, S.6
Kenworthy, M.A.7
-
10
-
-
34247517779
-
A novel 2×2 MEMS optical switch using the split cross-bar design
-
Y.-J. Yang, B.-T. Liao, and W.-C. Kuo, “A novel 2×2 MEMS optical switch using the split cross-bar design,” J. Micromech. Microeng., vol. 17, pp. 875–882, 2007.
-
(2007)
J. Micromech. Microeng.
, vol.17
, pp. 875-882
-
-
Yang, Y.-J.1
Liao, B.-T.2
Kuo, W.-C.3
-
11
-
-
10844260064
-
Polymer-based variable focal length microlens system
-
M. Agarwal, R. A. Gunasekaran, P. Coane, and K. Varahramyan, “Polymer-based variable focal length microlens system,” J. Micromech. Microeng., vol. 14, pp. 1665–1673, 2004.
-
(2004)
J. Micromech. Microeng.
, vol.14
, pp. 1665-1673
-
-
Agarwal, M.1
Gunasekaran, R.A.2
Coane, P.3
Varahramyan, K.4
-
12
-
-
0028762698
-
Three-dimensional micro-Fresnel optical elements fabricated by micromachining technique
-
Mar.
-
L. Y. Lin, S. S. Lee, K. S. J. Pister, and M. C. Wu, “Three-dimensional micro-Fresnel optical elements fabricated by micromachining technique,” Electron. Lett., vol. 30, no. 5, pp. 448–449, Mar. 1994.
-
(1994)
Electron. Lett.
, vol.30
, Issue.5
, pp. 448-449
-
-
Lin, L.Y.1
Lee, S.S.2
Pister, K.S.J.3
Wu, M.C.4
-
13
-
-
0039225612
-
The grating light valve: Revolutionizing display technology
-
Feb.
-
D. M. Bloom, “The grating light valve: Revolutionizing display technology,” in Proc. SPIE, Feb. 1997, vol. 3013, pp. 165–171.
-
(1997)
Proc. SPIE
, vol.3013
, pp. 165-171
-
-
Bloom, D.M.1
-
14
-
-
33646168531
-
Characterization and fabrication of MOEMS-based diffractive optical switching elements
-
Jan.
-
J. Verheggen, G. Panaman, and J. Castracane, “Characterization and fabrication of MOEMS-based diffractive optical switching elements,” in Proc. SPIE, Jan. 2006, vol. 6114, pp. 61140F-1–61140F-9.
-
(2006)
Proc. SPIE
, vol.6114
, pp. 61140F-1-61140F-9
-
-
Verheggen, J.1
Panaman, G.2
Castracane, J.3
-
15
-
-
20844445425
-
Nanoimprinted strain-controlled elastomeric gratings for optical wavelength tuning
-
Y.-C. Tung and K. Kurabayashi, “Nanoimprinted strain-controlled elastomeric gratings for optical wavelength tuning,” Appl. Phys. Lett., vol. 86, pp. 161113-1–161113-3, 2005.
-
(2005)
Appl. Phys. Lett.
, vol.86
, pp. 161113-1-161113-3
-
-
Tung, Y.-C.1
Kurabayashi, K.2
-
16
-
-
4344627746
-
Elastomer-based diffractive optical modulator
-
May/Jun.
-
S. Uma, R. Matusiak, D. L. Hecht, and E. J. Shrader, “Elastomer-based diffractive optical modulator,” IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 435–439, May/Jun. 2004.
-
(2004)
IEEE J. Sel. Topics Quantum Electron.
, vol.10
, Issue.3
, pp. 435-439
-
-
Uma, S.1
Matusiak, R.2
Hecht, D.L.3
Shrader, E.J.4
-
17
-
-
2142676866
-
High-resolution laser-projection display system using a grating electromechanical system (GEMS)
-
Jan.
-
J. C. Brazas and M. W. Kowarz, “High-resolution laser-projection display system using a grating electromechanical system (GEMS),” in Proc. SPIE, Jan. 2004, vol. 5348, pp. 65–75.
-
(2004)
Proc. SPIE
, vol.5348
, pp. 65-75
-
-
Brazas, J.C.1
Kowarz, M.W.2
-
18
-
-
10944223513
-
Analog piezoelectric-driven tunable gratings with nanometer resolution
-
Dec.
-
C. W. Wong, Y. Jeon, G. Barbastathis, and S.-G. Kim, “Analog piezoelectric-driven tunable gratings with nanometer resolution,” J. Microeletromech. Syst., vol. 13, no. 6, pp. 998–1005, Dec. 2004.
-
(2004)
J. Microeletromech. Syst.
, vol.13
, Issue.6
, pp. 998-1005
-
-
Wong, C.W.1
Jeon, Y.2
Barbastathis, G.3
Kim, S.-G.4
-
19
-
-
33745172140
-
Tunable blazed gratings
-
Jun.
-
X. Li, C. Antoine, D. Lee, J.-S. Wang, and O. Solgaard, “Tunable blazed gratings,” J. Microeletromech. Syst., vol. 15, no. 3, pp. 597–604, Jun. 2006.
-
(2006)
J. Microeletromech. Syst.
, vol.15
, Issue.3
, pp. 597-604
-
-
Li, X.1
Antoine, C.2
Lee, D.3
Wang, J.-S.4
Solgaard, O.5
-
20
-
-
18944389081
-
An open-loop nano-positioning micromechanical digital-to-analog converter for grating light modulation
-
May
-
G. Zhou, V. J. Logeeswaran, and F. S. Chau, “An open-loop nano-positioning micromechanical digital-to-analog converter for grating light modulation,” IEEE Photon. Technol. Lett., vol. 17, no. 5, pp. 1010–1012, May 2005.
-
(2005)
IEEE Photon. Technol. Lett.
, vol.17
, Issue.5
, pp. 1010-1012
-
-
Zhou, G.1
Logeeswaran, V.J.2
Chau, F.S.3
-
21
-
-
62649093502
-
A large-displacement thermal actuator designed for MEMS pitch-tunable grating
-
Y.-S. Yang, Y.-H. Lin, Y.-C. Hu, and C.-H. Liu, “A large-displacement thermal actuator designed for MEMS pitch-tunable grating,” J. Micromech. Microeng., vol. 19, pp. 015001-1–015001-12, 2009.
-
(2009)
J. Micromech. Microeng.
, vol.19
, pp. 015001-1-015001-12
-
-
Yang, Y.-S.1
Lin, Y.-H.2
Hu, Y.-C.3
Liu, C.-H.4
-
22
-
-
33744809799
-
MEMS-based digital transform spectrometers
-
Nov.
-
Y. Geller, “MEMS-based digital transform spectrometers,” Amer. Lab., vol. 37, no. 22, pp. 19–21, Nov. 2005.
-
(2005)
Amer. Lab.
, vol.37
, Issue.22
, pp. 19-21
-
-
Geller, Y.1
-
23
-
-
0035443264
-
Fabrication of a micromachined optical modulator using the CMOS process
-
C.-L. Dai, H.-L. Chen, and P.-Z. Chang, “Fabrication of a micromachined optical modulator using the CMOS process,” J. Micromech. Microeng., vol. 11, pp. 612–615, 2001.
-
(2001)
J. Micromech. Microeng.
, vol.11
, pp. 612-615
-
-
Dai, C.-L.1
Chen, H.-L.2
Chang, P.-Z.3
-
24
-
-
0030869870
-
Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices
-
Jan.
-
B. Bhushan and X. Li, “Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices,” J. Mater. Res., vol. 12, no. 1, pp. 54–63, Jan. 1997.
-
(1997)
J. Mater. Res.
, vol.12
, Issue.1
, pp. 54-63
-
-
Bhushan, B.1
Li, X.2
-
25
-
-
0141754094
-
Heat treatment for reduction of surface roughness on holographic gratings
-
Sep.
-
R. Rabady, D. Frankstein, and I. Avrutsky, “Heat treatment for reduction of surface roughness on holographic gratings,” Opt. Lett., vol. 28, no. 18, pp. 1665–1667, Sep. 2003.
-
(2003)
Opt. Lett.
, vol.28
, Issue.18
, pp. 1665-1667
-
-
Rabady, R.1
Frankstein, D.2
Avrutsky, I.3
-
26
-
-
0036253903
-
Segmented silicon-micromachined microelectromechanical deformable mirrors for adaptive optics
-
Jan./Feb.
-
A. Tuantranont and V. M. Bright, “Segmented silicon-micromachined microelectromechanical deformable mirrors for adaptive optics,” IEEE J. Sel. Topics Quantum Electron., vol. 8, no. 1, pp. 33–45, Jan./Feb. 2002.
-
(2002)
IEEE J. Sel. Topics Quantum Electron.
, vol.8
, Issue.1
, pp. 33-45
-
-
Tuantranont, A.1
Bright, V.M.2
|