Moving reflector type micro optical switch for high-power transfer in a MEMS-based safety and arming system

Journal of Micromechanics and Microengineering

Volumn 14, Issue 1, 2004, Pages 138-146

  Cochran, Kevin R ^a,b   Fan, Lawrence ^b   DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b NAVAL SURFACE WARFARE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROOPTICS; MIRRORS; MULTIMODE FIBERS; OPTICAL RESOLVING POWER; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY;

DEEP REACTIVE ION ETCHING; MICRO OPTICAL SWITCH; MOVING REFLECTOR TYPE; OPTICAL EFFICIENCY;

OPTICAL SWITCHES;

EID: 0942279180     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/1/019     Document Type: Article

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