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IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 1, 2002, Pages 33-45

Segmented silicon-micromachined microelectromechanical deformable mirrors for adaptive optics

(2) Tuantranont, Adisorn a Bright, Victor M a

a UCB 450 (United States)

Author keywords

Aberration correction; Adaptive optics; Deformable mirror; Infrared; MEMS; Microlens; Micromirror; MOEMS; Optical MEMS

Indexed keywords

ABERRATIONS; ADAPTIVE OPTICS; ATMOSPHERIC TURBULENCE; COSTS; FLIP CHIP DEVICES; INFRARED SPECTROSCOPY; LIGHT MODULATION; MICROACTUATORS; MICROLENSES; MICROMACHINING; MIRRORS; OPTICAL TELESCOPES; SEMICONDUCTING SILICON; WAVEFRONTS;

SILICON MICROMACHINED MICROELECTROMECHANICAL DEFORMABLE MIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036253903 PISSN: 1077260X EISSN: None Source Type: Journal
DOI: 10.1109/2944.991397 Document Type: Article

Times cited : (36)

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