An open-loop nano-positioning micromechanical digital-to-analog converter for grating light modulation

IEEE Photonics Technology Letters

Volumn 17, Issue 5, 2005, Pages 1010-1012

  Zhou, Guangya ^a   Logeeswaran, V J ^a   Chau, Fook Siong ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Diffraction grating; Grating light modulator; Microelectromechanical systems (MEMS); Optical microelectromechanical systems (MEMS)

Indexed keywords

DIFFRACTION GRATINGS; DIGITAL TO ANALOG CONVERSION; ELECTRIC POTENTIAL; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL COMMUNICATION; POLYSILICON; SCANNING ELECTRON MICROSCOPY;

GRATING LIGHT MODULATOR; MICROELECTROMECHANICAL DIGITAL-TO-ANALOG CONVERTER; OPTICAL MICROELECTROMECHANICAL SYSTEMS (MEMS);

LIGHT MODULATORS;

EID: 18944389081     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.845717     Document Type: Article

References (5)

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