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Volumn 6114, Issue , 2006, Pages

Characterization and fabrication of MOEMS-based diffractive optical switching elements

Author keywords

Diffraction Gratings; Free Space Optical Communication; FSOI; Mems Compound Grating; MOEMS; Optical Interconnect

Indexed keywords

DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; MICROELECTROMECHANICAL DEVICES; MULTIPLEXING; POLYIMIDES; SIGNAL PROCESSING; SIGNAL RECEIVERS;

EID: 33646168531     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.647806     Document Type: Conference Paper
Times cited : (4)

References (8)
  • 2
    • 0037056332 scopus 로고    scopus 로고
    • 512-Channel vertical-cavity surface-emitting laser based free-space optical link
    • M. Châteauneuf, A. Kirk, D. Plant, T. Yamamoto, and J. Ahearn, "512-Channel Vertical-Cavity Surface-Emitting Laser Based Free-Space Optical Link", Appl. Opt. 41, 5552-5561 (2002)
    • (2002) Appl. Opt. , vol.41 , pp. 5552-5561
    • Châteauneuf, M.1    Kirk, A.2    Plant, D.3    Yamamoto, T.4    Ahearn, J.5
  • 4
    • 0032225648 scopus 로고    scopus 로고
    • MEMS-based micro gratings: Preliminary results of novel configurations
    • J. Castracane and M. Gutin, "MEMS-based micro gratings: preliminary results of novel configurations" Proc. SPIE Int. Soc. Opt. Eng. 3276, 196 (1998)
    • (1998) Proc. SPIE Int. Soc. Opt. Eng. , vol.3276 , pp. 196
    • Castracane, J.1    Gutin, M.2
  • 6
    • 0031168990 scopus 로고    scopus 로고
    • M-Test: A test chip for MEMS material property measurement using electrostatically actuated test structures
    • P. Osterberg and S. Senturia, "M-Test: a test chip for MEMS material property measurement using electrostatically actuated test structures" J. Microelectromech. Syst. 6 107-17 1997
    • (1997) J. Microelectromech. Syst. , vol.6 , pp. 107-117
    • Osterberg, P.1    Senturia, S.2
  • 8
    • 21844479295 scopus 로고    scopus 로고
    • Performance improvements of MOEMS-based diffractive arrays: Address isolation and optical switching
    • Ed: A. El-Fatatry, SPIE, San Jose
    • G. Panaman, S. Madison, M. Sano, and J. Castracane, "Performance improvements of MOEMS-based diffractive arrays: address isolation and optical switching" Proc. SPIE "MOEMS and Miniaturized Systems V", Ed: A. El-Fatatry, Vol. 5719, p. 54-63, SPIE, San Jose (2005)
    • (2005) Proc. SPIE "MOEMS and Miniaturized Systems V" , vol.5719 , pp. 54-63
    • Panaman, G.1    Madison, S.2    Sano, M.3    Castracane, J.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.