A novel 2 × 2 MEMS optical switch using the split cross-bar design

Journal of Micromechanics and Microengineering

Volumn 17, Issue 5, 2007, Pages 875-882

  Yang, Yao Joe ^a   Liao, Bo Ting ^a   Kuo, Wen Cheng ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRAINT THEORY; DYNAMIC RESPONSE; INDUCTIVELY COUPLED PLASMA; MEMS; MIRRORS; OPTICAL DESIGN; PLASMA ETCHING;

BI-STABLE MECHANISMS; MIRROR-ARRAY DESIGN; MOVABLE MIRRORS; SPLIT CROSS-BAR (SCB) DESIGN;

OPTICAL SWITCHES;

EID: 34247517779     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/5/005     Document Type: Article

References (24)

1. Noh Y O, Kim J M, Yang M S, Choi H J, Lee H J, Won Y H and Han S G 2004 Thermooptic 2 × 2 asymmetric digital optical switches with zero-voltage operation state IEEE Photon. Technol. Lett. 16 446-8
2. Zhang A L, Chan K T, Demokan M S, Chan W C, Chan C H, Kwok H S and Chan H P 2005 Integrated liquid crystal optical switch based on total internal reflection Appl. Phys. Lett. 86 211108
3. Marxer C, Thio C, Gretillat M A, de Rooij N F, Battig R, Anthamatten O, Valk B and Vogel P 1997 Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications J. Microelectromech. Syst. 6 277-85
4. Wang Z F, Cao W, Shan X C, Xu J F, Lim S P, Noell W and de Rooij N F 2004 Development of 1× 4 MEMS-based optical switch Sensors Actuators A 114 80-7
5. Pieri F and Piotto M 2000 A micromachined bi-stable 1× 2 switch for optical fibers Microelectron. Eng. 53 561-4
6. Hoffmann M, Nusse D and Voges E 2003 An electrostatically actuated 1× 2 moving-fiber switch IEEE Photon. Technol. Lett. 15 39-41
7. Wu G, Mirza A R, Gamage S K, Ukrainczyk L, Shashidhar N, Wruck G and Ruda M 2004 Design and use of compact lensed fibers for low cost packaging of optical MEMS components J. Micromech. Microeng. 14 1367-75
8. Lee C K and Wu C Y 2005 Study of electrothermal V-beam actuators and latched mechanism for optical switch J. Micromech. Microeng. 15 11-9
9. Chen R T, Nguyen H and Wu M C 1999 A high-speed low-voltage stress-induced micromachined 2 × 2 optical switch IEEE Photon. Technol. Lett. 11 1396-8
10. Horsley D A, Davis W O, Hogan K J, Hart M R, Ying E C, Chaparala M, Behin B, Daneman M J and Kiang M H 2005 Optical and mechanical performance of a novel magnetically actuated MEMS-based optical switch J. Microelectromech. Syst. 14 274-84
11. Kuo J N, Lee G B and Pan W F 2004 A high-speed low-voltage double-switch optical crossconnect using stress-induced bending micromirrors IEEE Photon. Technol. Lett. 16 2042-4
12. Hogari K and Matsumoto T 1991 Electrostatically driven micromechanical 2 × 2 optical switch Appl. Opt. 30 1253-7
13. Toshiyoshi H and Fujita H 1996 Electrostatic micro torsion mirrors for an optical switch matrix J. Microelectromech. Syst. 5 231-7
14. Kim T H, Kwon H N, Hong J Y and Lee J H 2005 2 × 2 bi-reflection optical add-drop module with variable attenuation using four 45° micromirrors Proc. SPIE 5719 23-9
15. Qiu J, Lang J H and Slocum A H 2004 A curved-beam bi-stable mechanism J. Microelectromech. Syst. 13 137-46
16. Vangbo M 1998 An analytical analysis of a compressed bi-stable buckled beam Sensors Actuators A 69 212-6
17. Maloney J M, Schreiber D S and DeVoe D L 2004 Large-force electrothermal linear micromotors J. Micromech. Microeng. 14 226-34
18. Mita Y, Sugiyama M, Kubota M, Marty F, Bourouina T and Shibata T 2006 Aspect ratio dependent scalloping attenuation in DRIE and an application to low-loss fiber-optical switches Proc. 19th IEEE Int. Conf. on Micoelectromechanical Systems (MEMS January 2006, Istanbul, Turkey) (Digest Technical Papers) pp 114-7
19. Hsieh J W and Fang W L 2002 A boron etch-stop assisted lateral silicon etching process for improved high-aspect-ratio silicon micromachining and its applications J. Micromech. Microeng. 12 574-81
20. Yang Y, Liu W, Wu Y, Yang J and Wang Y 2003 Novel MEMS torsional mirror optical switch Proc. SPIE 5281 718-26
21. Product Information of Corning OptiFocus™ Collimating Lensed Fiber, Corning Inc., 2003
22. Glassbrenner C J and Slack G A 1964 Thermal conductivity of silicon and germanium from 3 K to the melting point Phys. Rev. 134 A1058-69
23. Roberts R B 1981 Thermal expansion reference data: silicon 300-850 K J. Phys. D: Appl. Phys. 14 L163-6
24. Goldsmith A, Waterman T E and Hirschhorn H J 1961 Handbook of Thermophysical Properties of Solid Materials (Oxford: Pergamon)