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Volumn 4, Issue 4, 2016, Pages 189-196

Flexible MISFET Devices from Transfer Printed Si Microwires and Spray Coating

Author keywords

Microwires; silicon; spray coating; transfer printing

Indexed keywords

COATINGS; METAL INSULATOR BOUNDARIES; SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

EID: 84976603626     PISSN: None     EISSN: 21686734     Source Type: Journal    
DOI: 10.1109/JEDS.2016.2559586     Document Type: Article
Times cited : (30)

References (26)
  • 1
    • 84927583144 scopus 로고    scopus 로고
    • Technologies for printing sensors and electronics over large flexible substrates: A review
    • Jun.
    • S. Khan, L. Lorenzelli, and R. S. Dahiya, "Technologies for printing sensors and electronics over large flexible substrates: A review," IEEE Sensors J., vol. 15, no. 6, pp. 3164-3185, Jun. 2015.
    • (2015) IEEE Sensors J. , vol.15 , Issue.6 , pp. 3164-3185
    • Khan, S.1    Lorenzelli, L.2    Dahiya, R.S.3
  • 2
    • 84868089446 scopus 로고    scopus 로고
    • Fabrication of transistors on flexible substrates: From mass-printing to high-resolution alternative lithography strategies
    • P. F. Moonen, I. Yakimets, and J. Huskens, "Fabrication of transistors on flexible substrates: From mass-printing to high-resolution alternative lithography strategies," Adv. Mater., vol. 24, no. 41, pp. 5526-5541, 2012.
    • (2012) Adv. Mater. , vol.24 , Issue.41 , pp. 5526-5541
    • Moonen, P.F.1    Yakimets, I.2    Huskens, J.3
  • 3
    • 0035465563 scopus 로고    scopus 로고
    • Printing meets lithography: Soft approaches to high-resolution patterning
    • Sep.
    • B. Michel et al., "Printing meets lithography: Soft approaches to high-resolution patterning," IBM J. Res. Develop., vol. 45, no. 5, pp. 697-719, Sep. 2001.
    • (2001) IBM J. Res. Develop. , vol.45 , Issue.5 , pp. 697-719
    • Michel, B.1
  • 4
    • 84870313772 scopus 로고    scopus 로고
    • Roll-to-roll fabrication of large area functional organic materials
    • R. R. Søndergaard, M. Hösel, and F. C. Krebs, "Roll-to-roll fabrication of large area functional organic materials," J. Poly. Sci. B Poly. Phys., vol. 51, no. 1, pp. 16-34, 2013.
    • (2013) J. Poly. Sci. B Poly. Phys. , vol.51 , Issue.1 , pp. 16-34
    • Søndergaard, R.R.1    Hösel, M.2    Krebs, F.C.3
  • 6
    • 84947591967 scopus 로고    scopus 로고
    • Synthesis of large area graphene for high performance in flexible optoelectronic devices
    • E. O. Polat et al., "Synthesis of large area graphene for high performance in flexible optoelectronic devices," Sci. Rep., vol. 5, 2015, Art. no. 16744.
    • (2015) Sci. Rep. , vol.5
    • Polat, E.O.1
  • 7
    • 84859153476 scopus 로고    scopus 로고
    • Large-scale integration of semiconductor nanowires for high-performance flexible electronics
    • X. Liu, Y.-Z. Long, L. Liao, X. Duan, and Z. Fan, "Large-scale integration of semiconductor nanowires for high-performance flexible electronics," ACS Nano, vol. 6, no. 3, pp. 1888-1900, 2012.
    • (2012) ACS Nano , vol.6 , Issue.3 , pp. 1888-1900
    • Liu, X.1    Long, Y.-Z.2    Liao, L.3    Duan, X.4    Fan, Z.5
  • 8
    • 84874338540 scopus 로고    scopus 로고
    • Fast flexible electronics with strained silicon nanomembranes
    • Feb.
    • H. Zhou et al., "Fast flexible electronics with strained silicon nanomembranes," Sci. Rep., vol. 3, Feb. 2013, Art. no. 1291.
    • (2013) Sci. Rep. , vol.3
    • Zhou, H.1
  • 9
    • 33645142579 scopus 로고    scopus 로고
    • Material challenge for flexible organic devices
    • J. Lewis, "Material challenge for flexible organic devices," Mater. Today, vol. 9, no. 4, pp. 38-45, 2006.
    • (2006) Mater. Today , vol.9 , Issue.4 , pp. 38-45
    • Lewis, J.1
  • 10
    • 34547816749 scopus 로고    scopus 로고
    • Inorganic semiconductors for flexible electronics
    • Y. Sun and J. A. Rogers, "Inorganic semiconductors for flexible electronics," Adv. Mater., vol. 19, no. 15, pp. 1897-1916, 2007.
    • (2007) Adv. Mater. , vol.19 , Issue.15 , pp. 1897-1916
    • Sun, Y.1    Rogers, J.A.2
  • 11
    • 84858968491 scopus 로고    scopus 로고
    • Fast flexible electronics using transferrable silicon nanomembranes
    • K. Zhang, J.-H. Seo, W. Zhou, and Z. Ma, "Fast flexible electronics using transferrable silicon nanomembranes," J. Phys. D Appl. Phys., vol. 45, no. 14, 2012, Art. no. 143001.
    • (2012) J. Phys. D Appl. Phys. , vol.45 , Issue.14
    • Zhang, K.1    Seo, J.-H.2    Zhou, W.3    Ma, Z.4
  • 12
    • 84865611611 scopus 로고    scopus 로고
    • Fabrication of single crystal silicon micro-/nanostructures and transferring them to flexible substrates
    • Oct.
    • R. S. Dahiya, A. Adami, C. Collini, and L. Lorenzelli, "Fabrication of single crystal silicon micro-/nanostructures and transferring them to flexible substrates," Microelectron. Eng., vol. 98, pp. 502-507, Oct. 2012.
    • (2012) Microelectron. Eng. , vol.98 , pp. 502-507
    • Dahiya, R.S.1    Adami, A.2    Collini, C.3    Lorenzelli, L.4
  • 13
    • 84927634681 scopus 로고    scopus 로고
    • PDMS residues-free micro/macrostructures on flexible substrates
    • Mar.
    • R. Dahiya, G. Gottardi, and N. Laidani, "PDMS residues-free micro/macrostructures on flexible substrates," Microelectron. Eng., vol. 136, pp. 57-62, Mar. 2015.
    • (2015) Microelectron. Eng. , vol.136 , pp. 57-62
    • Dahiya, R.1    Gottardi, G.2    Laidani, N.3
  • 14
    • 84877741536 scopus 로고    scopus 로고
    • Deterministic assembly of releasable single crystal silicon-metal oxide field-effect devices formed from bulk wafers
    • T.-I. Kim et al., "Deterministic assembly of releasable single crystal silicon-metal oxide field-effect devices formed from bulk wafers," Appl. Phys. Lett., vol. 102, no. 18, 2013, Art. no. 182104.
    • (2013) Appl. Phys. Lett. , vol.102 , Issue.18
    • Kim, T.-I.1
  • 15
    • 84911952704 scopus 로고    scopus 로고
    • Flexible thermoelectric generator based on transfer printed Si microwires
    • presented at Venice, Italy
    • S. Khan, R. S. Dahiya, and L. Lorenzelli, "Flexible thermoelectric generator based on transfer printed Si microwires," presented at the 44th Eur. Solid State Device Res. Conf. (ESSDERC), Venice, Italy, 2014, pp. 86-89.
    • (2014) The 44th Eur. Solid State Device Res. Conf. (ESSDERC) , pp. 86-89
    • Khan, S.1    Dahiya, R.S.2    Lorenzelli, L.3
  • 16
    • 84873057403 scopus 로고    scopus 로고
    • RF characterization of gigahertz flexible silicon thinfilm transistor on plastic substrates under bending conditions
    • Feb.
    • G. Qin et al., "RF characterization of gigahertz flexible silicon thinfilm transistor on plastic substrates under bending conditions," IEEE Electron Device Lett., vol. 34, no. 2, pp. 262-264, Feb. 2013.
    • (2013) IEEE Electron Device Lett. , vol.34 , Issue.2 , pp. 262-264
    • Qin, G.1
  • 17
    • 84884149565 scopus 로고    scopus 로고
    • Bendable ultra-thin chips on flexible foils
    • Oct.
    • R. S. Dahiya and S. Gennaro, "Bendable ultra-thin chips on flexible foils," IEEE Sensors J., vol. 13, no. 10, pp. 4030-4037, Oct. 2013.
    • (2013) IEEE Sensors J. , vol.13 , Issue.10 , pp. 4030-4037
    • Dahiya, R.S.1    Gennaro, S.2
  • 18
    • 77953019436 scopus 로고    scopus 로고
    • Electrohydrodynamic spray deposition of ZnO nanoparticles
    • K. H. Choi, S. Khan, H. W. Dang, Y. H. Doh, and S. J. Hong, "Electrohydrodynamic spray deposition of ZnO nanoparticles," Jpn. J. Appl. Phys., vol. 49, no. 5, 2010, Art. no. 05EC08.
    • (2010) Jpn. J. Appl. Phys. , vol.49 , Issue.5
    • Choi, K.H.1    Khan, S.2    Dang, H.W.3    Doh, Y.H.4    Hong, S.J.5
  • 19
    • 79953187558 scopus 로고    scopus 로고
    • Direct patterning and electrospray deposition through EHD for fabrication of printed thin film transistors
    • S. Khan et al., "Direct patterning and electrospray deposition through EHD for fabrication of printed thin film transistors," Current Appl. Phys., vol. 11, no. 1, pp. S271-S279, 2011.
    • (2011) Current Appl. Phys. , vol.11 , Issue.1 , pp. S271-S279
    • Khan, S.1
  • 20
    • 84867355863 scopus 로고    scopus 로고
    • Development of electrostatic inkjet head by integrating metallic and silica capillaries for stable meniscus
    • S. Khan et al., "Development of electrostatic inkjet head by integrating metallic and silica capillaries for stable meniscus," Mater. Manuf. Process., vol. 27, no. 11, pp. 1239-1244, 2012.
    • (2012) Mater. Manuf. Process. , vol.27 , Issue.11 , pp. 1239-1244
    • Khan, S.1
  • 21
    • 84861186640 scopus 로고    scopus 로고
    • Silicon crystal growth and wafer technologies
    • no. special centennial issue, May
    • G. Fisher, M. R. Seacrist, and R. W. Standley, "Silicon crystal growth and wafer technologies," Proc. IEEE, vol. 100, no. special centennial issue, pp. 1454-1474, May 2012.
    • (2012) Proc. IEEE , vol.100 , pp. 1454-1474
    • Fisher, G.1    Seacrist, M.R.2    Standley, R.W.3
  • 22
    • 84976540076 scopus 로고    scopus 로고
    • CMOS-technology-enabled flexible and stretchable electronics for internet of everything applications
    • A. M. Hussain and M. M. Hussain, "CMOS-technology-enabled flexible and stretchable electronics for internet of everything applications," Adv. Mater., 2015.
    • (2015) Adv. Mater.
    • Hussain, A.M.1    Hussain, M.M.2
  • 23
    • 79959675566 scopus 로고    scopus 로고
    • Fast flexible electronics based on printable thin monocrystalline silicon
    • Z. Ma et al., "Fast flexible electronics based on printable thin monocrystalline silicon," ECS Trans., vol. 34, no. 1, pp. 137-142, 2011.
    • (2011) ECS Trans. , vol.34 , Issue.1 , pp. 137-142
    • Ma, Z.1
  • 24
    • 42449150297 scopus 로고    scopus 로고
    • Introduction to microfabrication techniques
    • Totowa, NJ, USA: Springer
    • R. Zaouk, B. Y. Park, and M. J. Madou, "Introduction to microfabrication techniques," in Microfluidic Techniques. Totowa, NJ, USA: Springer, 2006, pp. 5-15.
    • (2006) Microfluidic Techniques. , pp. 5-15
    • Zaouk, R.1    Park, B.Y.2    Madou, M.J.3
  • 25
    • 84948691565 scopus 로고    scopus 로고
    • Flexible FETs using ultrathin Si microwires embedded in solution processed dielectric and metal layers
    • S. Khan, N. Yogeswaran, W. Taube, L. Lorenzelli, and R. Dahiya, "Flexible FETs using ultrathin Si microwires embedded in solution processed dielectric and metal layers," J. Micromech. Microeng., vol. 25, no. 12, 2015, Art. no. 125019.
    • (2015) J. Micromech. Microeng. , vol.25 , Issue.12
    • Khan, S.1    Yogeswaran, N.2    Taube, W.3    Lorenzelli, L.4    Dahiya, R.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.