Fast flexible electronics based on printable thin mono-crystalline silicon

ECS Transactions

Volumn 34, Issue 1, 2011, Pages 137-142

  Ma, Zhenqiang ^a   Zhang, Kan ^a   Seo, Jung Hun ^a   Zhou, Han ^a   Sun, Lei ^a   Yuan, Hao Chih ^a   Qin, Guoxuan ^a   Pang, Huiqing ^a   Zhou, Weidong ^b  

^a University of Wisconsin Madison   (United States)

^b University of Texas at Arlington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCESS RESISTANCE; ACTIVE MATERIAL; AMORPHOUS SI; BULK COUNTERPART; BURIED OXIDE LAYERS; DEVICE SPEED; DEVICE STRUCTURES; FABRICATION PROCESS; FEATURE SIZES; HIGH TEMPERATURE PROCESS; HIGH-QUALITY MATERIALS; MECHANICAL FLEXIBILITY; MOBILITY VALUE; MONOCRYSTALLINE; ORGANIC MATERIALS; PLASTIC SUBSTRATES; RADIO FREQUENCIES; SILICON ON INSULATOR; STRAINED CHANNELS;

AMORPHOUS MATERIALS; AMORPHOUS SILICON; CARRIER MOBILITY; MONOCRYSTALLINE SILICON; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING; THIN FILM TRANSISTORS; TRANSISTORS;

FLEXIBLE ELECTRONICS;

EID: 79959675566     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3567572     Document Type: Conference Paper

References (15)

1. J. A. Rogers, T. Someya and H. Yonggang, Science, 327, 1603 (2010).
2. S.-I. Park, Y. Xiong, R.-H. Kim, P. Elvikis, M. Meitl, D.-H. Kim, J. Wu, J. Yoon, Y. Chang-Jae, Z. Liu, Y. Huang, K.-C. Hwang, P. Ferreira, L. Xiuling, K. Choquette and J. A. Rogers, Science, 325, 977 (2009).
3. D.-H. Kim, J. Xiao, J. Song, Y. Huang and J. A. Rogers, Advanced Materials, 22, 2108 (2010).
4. Y. Sun and J. A. Rogers, Advanced Materials, 19, 1897 (2007).
5. H.-C. Yuan and Z. Ma, Applied Physics Letters, 89, 212105 (2006).
6. H.-C. Yuan, G. K. Celler and Z. Ma, Journal of Applied Physics, 102, 034501 (2007).
7. L. Sun, G. Qin, J.-H. Seo, G. K. Celler, W. Zhou and Z. Ma, Small, 6, 2553 (2010).
8. Y. Sun, E. Menard, J. A. Rogers, H.-S. Kim, S. Kim, G. Chen, I. Adesida, R. Dettmer, R. Cortez and A. Tewksbury, Applied Physics Letters, 88, 183509 (2006).
9. J. Yoon, S. Jo, I. S. Chun, I. Jung, H.-S. Kim, M. Meitl, E. Menard, X. Li, J. J. Coleman, U. Paik and J. A. Rogers, Nature, 465, 329 (2010).
10. Z. Ma and L. Sun, in IEEE 10th Annual Wireless and Microwave Technology Conference, Clearwater, FL, United states (2009).
11. G. M. Cohen, P. M. Mooney, V. K. Paruchuri and H. J. Hovel, Applied Physics Letters, 86, 251902 (2005).
12. E. Menard, R. G. Nuzzo and J. A. Rogers, Applied Physics Letters, 86, 093507 (2005).
13. H.-C. Yuan, Z. Ma, M. M. Roberts, D. E. Savage and M. G. Lagally, Journal of Applied Physics, 100, 013708 (2006).
14. G. Qin, H.-C. Yuan, G. K. Celler, W. Zhou and Z. Ma, Journal of Physics D: Applied Physics, 42, 234006 (9 pp.) (2009).
15. H.-C. Yuan, M. M. Kelly, D. E. Savage, M. G. Lagally, G. K. Celler and Z. Ma, IEEE Transactions on Electron Devices, 55, 810 (2008).