SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 502-507

Fabrication of single crystal silicon micro-/nanostructures and transferring them to flexible substrates

(4) Dahiya, Ravinder S a Adami, Andrea a Collini, Cristian a Lorenzelli, Leandro a

a FONDAZIONE BRUNO KESSLER (Italy)

Author keywords

Flexible electronics; PDMS; Si nanowires; Top down fabrication; Transfer printing

Indexed keywords

BUILDING BLOCKES; FABRICATION STRATEGIES; FLEXIBLE SUBSTRATE; INTEGRATED ELECTRONICS; MACRO SCALE; MICRO/NANOSTRUCTURES; PDMS; SI NANOWIRE; SILICON ON INSULATOR WAFERS; SINGLE CRYSTAL SILICON; SINGLE-CRYSTAL SI; TOP-DOWN FABRICATION; TOPDOWN; TRANSFER PRINTING;

FABRICATION; FIELD EFFECT TRANSISTORS; FLEXIBLE ELECTRONICS; MICROCHANNELS; NANOWIRES; POLYIMIDES; SILICON; SUBSTRATES; WIRE;

SILICON WAFERS;

EID: 84865611611 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2012.07.084 Document Type: Conference Paper

Times cited : (50)

References (15)

1
- 77950214388
- J.A. Rogers, T. Someya, and Y. Huang Science 327 2010 1603 1607
- (2010) Science , vol.327 , pp. 1603-1607
- Rogers, J.A.¹ Someya, T.² Huang, Y.³

2
- 77049107803
- S. Madhusudan, M.H. Hanna, D. Parul, and E.J. Ghassan Advanced Materials 22 2010 673 685
- (2010) Advanced Materials , vol.22 , pp. 673-685
- Madhusudan, S.¹ Hanna, M.H.² Parul, D.³ Ghassan, E.J.⁴

3
- 0034672078
- H. Sirringhaus, T. Kawase, R.H. Friend, T. Shimoda, M. Inbasekaran, W. Wu, and E.P. Woo Science 290 2000 2123 2126
- (2000) Science , vol.290 , pp. 2123-2126
- Sirringhaus, H.¹ Kawase, T.² Friend, R.H.³ Shimoda, T.⁴ Inbasekaran, M.⁵ Wu, W.⁶ Woo, E.P.⁷

4
- 84988044894
- J.H. Cho, J. Lee, Y. Xia, B. Kim, Y. He, M.J. Renn, T.P. Lodge, and C. Daniel Frisbie Nature Materials 7 2008 900 906
- (2008) Nature Materials , vol.7 , pp. 900-906
- Cho, J.H.¹ Lee, J.² Xia, Y.³ Kim, B.⁴ He, Y.⁵ Renn, M.J.⁶ Lodge, T.P.⁷ Daniel Frisbie, C.⁸

5
- 36048995049
- S. Gamerith, A. Klug, H. Scheiber, U. Scherf, E. Moderegger, and E.J.W. List Advanced Functional Materials 17 2007 3111 3118
- (2007) Advanced Functional Materials , vol.17 , pp. 3111-3118
- Gamerith, S.¹ Klug, A.² Scheiber, H.³ Scherf, U.⁴ Moderegger, E.⁵ List, E.J.W.⁶

6
- 70350339679
- H. Sirringhaus Advanced Materials 21 2009 3859 3873
- (2009) Advanced Materials , vol.21 , pp. 3859-3873
- Sirringhaus, H.¹

7
- 33745144948
- R.F. Service Science 312 2006 1593 1594
- (2006) Science , vol.312 , pp. 1593-1594
- Service, R.F.¹

8
- 33947103692
- C.M. Lieber, and Z.L. Wang MRS Bulletin 32 2007 99 104
- (2007) MRS Bulletin , vol.32 , pp. 99-104
- Lieber, C.M.¹ Wang, Z.L.²

9
- 42549116193
- D.-H. Kim, J.-H. Ahn, W.M. Choi, H.-S. Kim, T.-H. Kim, J. Song, Y.Y. Huang, Z. Liu, C. Lu, and J.A. Rogers Science 320 2008 507 511
- (2008) Science , vol.320 , pp. 507-511
- Kim, D.-H.¹ Ahn, J.-H.² Choi, W.M.³ Kim, H.-S.⁴ Kim, T.-H.⁵ Song, J.⁶ Huang, Y.Y.⁷ Liu, Z.⁸ Lu, C.⁹ Rogers, J.A.¹⁰

10
- 77957132246
- K. Takei, T. Takahashi, J.C. Ho, H. Ko, A.G. Gillies, P.W. Leu, R.S. Fearing, and A. Javey Nature Materials 9 2010 821 826
- (2010) Nature Materials , vol.9 , pp. 821-826
- Takei, K.¹ Takahashi, T.² Ho, J.C.³ Ko, H.⁴ Gillies, A.G.⁵ Leu, P.W.⁶ Fearing, R.S.⁷ Javey, A.⁸

11
- 77049120711
- R.S. Dahiya, G. Metta, M. Valle, and G. Sandini IEEE Transactions on Robotics 26 2010 1 20
- (2010) IEEE Transactions on Robotics , vol.26 , pp. 1-20
- Dahiya, R.S.¹ Metta, G.² Valle, M.³ Sandini, G.⁴

12
- 80455137062
- R.S. Dahiya, D. Cattin, A. Adami, C. Collini, L. Barboni, M. Valle, L. Lorenzelli, R. Oboe, G. Metta, and F. Brunetti IEEE Sensors Journal 11 2011 3216 3226
- (2011) IEEE Sensors Journal , vol.11 , pp. 3216-3226
- Dahiya, R.S.¹ Cattin, D.² Adami, A.³ Collini, C.⁴ Barboni, L.⁵ Valle, M.⁶ Lorenzelli, L.⁷ Oboe, R.⁸ Metta, G.⁹ Brunetti, F.¹⁰

13
- 77952344890
- S.-K. Lee, H. Jang, M. Hasan, J.B. Koo, and J.-H. Ahn Applied Physics Letters 96 2010 173501 173503
- (2010) Applied Physics Letters , vol.96 , pp. 173501-173503
- Lee, S.-K.¹ Jang, H.² Hasan, M.³ Koo, J.B.⁴ Ahn, J.-H.⁵

14
- 84865578576
- Fabrication of Single Crystal Silicon Mirco-/Nanowires and Transferring them to Flexible Substrates
- Berlin, Germany
- R.S. Dahiya, A. Adami, L. Lorenzelli, "Fabrication of Single Crystal Silicon Mirco-/Nanowires and Transferring them to Flexible Substrates" in Micro and Nano Engineering (MNE 2011), Berlin, Germany, 2011, pp. 1-2.
- (2011) Micro and Nano Engineering (MNE 2011) , pp. 1-2
- Dahiya, R.S.¹ Adami, A.² Lorenzelli, L.³

15
- 78650825626
- K.-Q. Peng, and S.-T. Lee Advanced Materials 23 2010 198 215
- (2010) Advanced Materials , vol.23 , pp. 198-215
- Peng, K.-Q.¹ Lee, S.-T.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.