Hybridization approach to in-line and off-axis (electron) holography for superior resolution and phase sensitivity

Scientific Reports

Volumn 4, Issue , 2014, Pages

  Ozsoy Keskinbora, C ^a   Boothroyd, C B ^b   Dunin Borkowski, R E ^b   Van Aken, P A ^a   Koch, C T ^c  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

^c UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; DRUG DOSAGE FORM; HOLOGRAPHY; NOISE; OPTICS; TERAHERTZ IMAGING; ULTRASOUND; X RAY;

EID: 84941349413     PISSN: None     EISSN: 20452322     Source Type: Journal    
DOI: 10.1038/srep07020     Document Type: Article

References (42)

1. Gabor, D. A New Microscopic Principle. Nature 161, 777-778 (1948).
2. Lundqvist, S. [Holography]. Nobel Lectures in Physics 1971-1980, World Scientific, Singapore, 1992.
3. Orchowski, A., Rau, W. D. & Lichte, H. Electron Holography Surmounts Resolution Limit of Electron Microscopy. Phys. Rev. Lett. 74, 399-402 (1995).
4. Rau, W. D., Schwander, P., Baumann, F. H., Höppner, W. & Ourmazd, A. Two- Dimensional Mapping of the Electrostatic Potential in Transistors by Electron Holography. Phys. Rev. Lett. 82, 2614-2617 (1999).
5. Loudon, J. C., Mathur, N. D. & Midgley, P. A. Charge-ordered ferromagnetic phase in La0.5Ca0.5MnO3. Nature 420, 797-800 (2002).
6. He, K., Ma, F.-X., Xu, C.-Y. & Cumings, J. Mapping magnetic fields of Fe3O4 nanosphere assemblies by electron holography. J. Appl. Phys. 113, 17B528 (2013).
7. Hÿtch, M., Houdellier, F., Hüe, F. & Snoeck, E. Nanoscale holographic interferometry for strain measurements in electronic devices. Nature 453, 1086-1089 (2008).
8. Koch, C. T., Özdöl, V. B.&Aken, P. A. van.An efficient, simple, and precise way to map strain with nanometer resolution in semiconductor devices. Appl. Phys. Lett. 96, 091901 (2010).
9. Twitchett-Harrison, A. C., Yates, T. J.V., Newcomb, S. B., Dunin-Borkowski, R. E. & Midgley, P. A. High-Resolution Three-Dimensional Mapping of Semiconductor Dopant Potentials. Nano Lett. 7, 2020-2023 (2007).
10. Simon, P. et al. Electron holography of biological samples. Micron 39, 229-256 (2008).
11. Cowley, J. M. Twenty forms of electron holography. Ultramicroscopy 41, 335-348 (1992).
12. Möllenstedt, G. & Düker, H. Fresnelscher Interferenzversuch mit einem Biprisma für Elektronenwellen. Naturwissenschaften 42, 41-41 (1955).
13. Lehmann, M. & Lichte, H. Tutorial on Off-Axis Electron Holography. Microsc. Microanal. 8, 447-466 (2002).
14. Möllenstedt, G. & Wahl, H. Elektronenholographie und Rekonstruktion mit Laserlicht. Naturwissenschaften 55, 340-341 (1968).
15. Haine, M. E. & Dyson, J. A Modification to Gabor's Proposed Diffraction Microscope. Nature 166, 315-316 (1950).
16. Kirkland, E. J. Improved high resolution image processing of bright field electron micrographs: I. Theory. Ultramicroscopy 15, 151-172 (1984).
17. Coene, W. M. J., Thust, A., Op de Beeck, M.& Van Dyck, D. Maximum-likelihood method for focus-variation image reconstruction in high resolution transmission electron microscopy. Ultramicroscopy 64, 109-135 (1996).
18. Koch, C. T. A flux-preserving non-linear inline holography reconstruction algorithm for partially coherent electrons. Ultramicroscopy 108, 141-150 (2008).
19. Reed Teague, M. Deterministic phase retrieval: a Green's function solution. J. Opt. Soc. Am. 73, 1434-1441 (1983).
20. Kirkland, A. I., Saxton, W. O., Chau, K.-L., Tsuno, K. & Kawasaki, M. Superresolution by aperture synthesis: tilt series reconstruction in CTEM. Ultramicroscopy 57, 355-374 (1995).
21. Haigh, S. J., Sawada, H.&Kirkland, A. I. Optimal tilt magnitude determination for aberration-corrected super resolution exit wave function reconstruction. Philos. Transact. A Math. Phys. Eng. Sci. 367, 3755-3771 (2009).
22. Koch, C. T. Towards full-resolution inline electron holography. Micron 69, 69-75 (2014).
23. Haigh, S. J., Jiang, B., Alloyeau, D., Kisielowski, C. & Kirkland, A. I. Recording low and high spatial frequencies in exit wave reconstructions. Ultramicroscopy 133, 26-34 (2013).
24. Dunin-Borkowski, R. E. The development of Fresnel contrast analysis, and the interpretation of mean inner potential profiles at interfaces. Ultramicroscopy 83, 193-216 (2000).
25. Twitchett, A. C., Dunin-Borkowski, R. E. &Midgley, P. A. Comparison of off-axis and in-line electron holography as quantitative dopant-profiling techniques. Philos. Mag. 86, 5805-5823 (2006).
26. Koch, C. T. & Lubk, A. Off-axis and inline electron holography: A quantitative comparison. Ultramicroscopy 110, 460-471 (2010).
27. Latychevskaia, T., Formanek, P., Koch, C. T. & Lubk, A. Off-axis and inline electron holography: Experimental comparison. Ultramicroscopy 110, 472-482 (2010).
28. Koch, C. T. Determination of grain boundary potentials in ceramics: Combining impedance spectroscopy and inline electron holography. Int. J. Mater. Res. 101, 43-49 (2010).
29. Geilhufe, J. et al. Monolithic focused reference beam X-ray holography. Nat. Commun. 5 (2014).
30. Ruhlandt, A., Krenkel, M., Bartels, M. & Salditt, T. Three-dimensional phase retrieval in propagation-based phase-contrast imaging. Phys. Rev. A 89, 033847 (2014).
31. Rosenhahn, A. et al. Digital in-line soft x-ray holography with element contrast. J. Opt. Soc. Am. A Opt. Image Sci. Vis. 25, 416-422 (2008).
32. Wachulak, P. W., Bartels, R. A., Marconi, M. C., Menoni, C. S. & Rocca, J. J. Table Top Extreme Ultraviolet Holography. in Conf. Lasers Electro-Opt. Electron. Laser Sci. Conf. Photonic Appl. Syst. Technol. CMX3 (Optical Society of America, 2007). at , http://www.opticsinfobase.org/abstract.cfm?URI5CLEO-2007-CMX3..
33. Baars, J. W. M., Lucas, R., Mangum, J. G. & Lopez-Perez, J. A. Near-Field Radio Holography of Large Reflector Antennas. ArXiv07104244 Astro-Ph at http://arxiv.org/abs/0710.4244 (2007).
34. Khare, K., Ali, P. T. S. & Joseph, J. Single shot high resolution digital holography. Opt. Express 21, 2581-2591 (2013).
35. Kemper, B., Langehanenberg, P. & von Bally, G. Digital HolographicMicroscopy. Opt. Photonik 2, 41-44 (2007).
36. Ophus, C. & Ewalds, T. Guidelines for quantitative reconstruction of complex exit waves in HRTEM. Ultramicroscopy 113, 88-95 (2012).
37. Joy, D. C. SMART-a program to measure SEM resolution and imaging performance. J. Microsc. 208, 24-34 (2002).
38. Yi, J. et al. High-resolution hard-x-ray microscopy using second-order zone-plate diffraction. J. Phys. Appl. Phys. 44, 232001 (2011).
39. Schowalter, M., Titantah, J. T., Lamoen, D. & Kruse, P. Ab initio computation of the mean inner Coulomb potential of amorphous carbon structures. Appl. Phys. Lett. 86, 112102-112102-3 (2005).
40. Koch, C. T. Useful Plugins and Scripts for DigitalMicrograph j ELIM: Electron and Ion Microscopy. at http://elim.physik.uni-ulm.de/?page-id5564, Date of access: 29/09/14.
41. Bonevich, J. US Department of Commerce, N. Electron holography. at http:// www.nist.gov/mml/msed/functional-nanostructure/electron-holography.cfm, Date of access: 29/09/14.
42. Mitchell, D. Mean Free Path Estimator at http://portal.tugraz.at/portal/page/ portal/felmi/DM-Script/DM-Script-Database, Date of access: 29/09/14.