SMART - A program to measure SEM resolution and imaging performance

Journal of Microscopy

Volumn 208, Issue 1, 2002, Pages 24-34

  Joy, D C ^a,b  

^a UNIVERSITY OF TENNESSEE   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Fourier transform; Probe size; Resolution; Scanning electron microscope; Signal to noise

Indexed keywords

FOURIER ANALYSIS; SIGNAL TO NOISE RATIO;

ASTIGMASTISM; FOURIER'S ANALYSIS; IMAGING PERFORMANCE; PROBE SIZE; RESOLUTION; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRONS; SIGNAL TO NOISE; SPATIAL RESOLUTION;

SCANNING ELECTRON MICROSCOPY;

ARTICLE; ASTIGMATISM; AUTOMATION; COMPUTER PROGRAM; DEPTH PERCEPTION; FOURIER ANALYSIS; OPTICAL RESOLUTION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SCANNING MICROSCOPE ASSESSMENT AND RESOLUTION; SIGNAL NOISE RATIO;

EID: 0036437068     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.2002.01062.x     Document Type: Article

References (21)

1. Cooley, J.W. & Tukey, J.W. (1965) A rapid algorithm for the evaluation of discrete Fourier transforms. Math. Computat. 19, 297-301.
2. Dodson, T.A. & Joy, D.C. (1990) Resolution measurement of SEM images. Proceedings of the 12th International Conference on Electron Microscopy, vol. 1 (ed. by G. W. Bailey), pp. 406-407. San Francisco Press, San Francisco.
3. Erasmus, S.J., Holburn, D.M. & Smith, K.C.A. (1980) On-line computation of diffractograms for the analysis of SEM images. Inst Phys. Conf Series, 52, 73-76.
4. Frank, J. (1980) Computer Processing of Electron Microscope Images. Springer Verlag, New York, pp. 187-222.
5. Frank, J., Bussler, P., Langer, R. & Hoppe, W. (1970) Transmission electron diffractograms. Ber. Busenges. Phys. Chem. 74, 1105-1115 (in German).
6. Frank, J. & El Ali, L. (1975) Signal to noise ratio of electron micrographs obtained by cross-correlation. Nature, 256, 376-379.
7. Goldstein, J.I., Newbury, D.E., Echlin, P., Joy, D.C., Lifshin, E. & Fiori, C.E. (1992) Practical Scanning Electron Microscopy and Microanalysis. Plenum Publishing, New York.
8. Joy, D.C. (1974) Measurement of SEM parameters. Proceedings of the 7th SEM Symposium (ed. by O. Johari), pp. 327-334. IITRI, Chicago.
9. Joy, D.C., Joy, C.S. & Bunn, R.D. (1996) Measurement of detector efficiencies in the SEM. Scanning, 18, 533-538.
10. Kratschmer, E., Rishton, S.A., Kern, D.P. & Chang, T.H.P. (1988) Quantitative analysis of Resolution and stability in nanometer electron beam lithography. J. Vac. Sci. Technol. B6, 2074-2079.
11. Maunly, A. & Fanget, G.L. (1999) A contribution to the evaluation of SEM resolution. SPIE Proc. Microlithogr. 3332, 71-80.
12. Oho, E., Asai, N. & Itoh, S. (2000) Image quality improvement using helium gas in a low voltage variable pressure SEM. J. Electron Microsc. 49, 761-763.
13. Oho, E. & Toyomura, K. (2001) Strategies for the optimum use of superposition diffractograms. Scanning, 23, 351-356.
14. Oran, B.E. (1974) The Fast Fourier Transform. Prentice Hall, New Jersey.
15. Postek, M. & Vladar, A. (1997a) Image sharpness measurement in scanning electron microscopy - Part 1. Scanning, 20, 1-9.
16. Postek, M. & Vladar, A. (1997b) Image sharpness measurement in scanning electron microscopy - Part 2. Scanning, 20, 24-34.
17. Postek, M. & Vladar, A. (2000) Potential of On-line SEM performance analysis using RM8091. Metrology, Inspections and Process Control for MicroLithography, XIV, Proceedings of the SPIE, 3998, 28-37.
18. Rosenberg, I. (2002) A Rayleigh related method of determining electron microscope resolution. Metrology, Inspections and Process Control for MicroLithography, XVII, Proceedings of the SPIE, 4689, in press.
19. Sato, M. (1997) Handbook of Charged Particle Optics (ed. by J. Orloff), pp. 319-361. CRC Press, Boca Raton, FL.
20. Thong, T.H.L., Sim, K.S. & Phang, J.C.H. (2001) Single image signal to noise ratio estimate. Scanning, 23, 328-336.
21. Williams, D.B. & Carter, B. (1996) Introduction to Transmission Electron Microscopy. Plenum Publishing, New York, pp. 462-468.