High-Frequency Performance of Trigate Poly-Si Thin-Film Transistors by Microwave Annealing

IEEE Electron Device Letters

Volumn 36, Issue 4, 2015, Pages 345-347

  Hu, Hsin Hui ^a   Huang, Hsin Ping ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Microwave annealing (MWA); polycrystalline silicon thin film transistors (poly Si TFTs); radio frequency (RF)

Indexed keywords

ANNEALING; MICROWAVE HEATING; MICROWAVES; POLYSILICON; RAPID THERMAL ANNEALING; SILICON; TEMPERATURE; THIN FILMS;

HIGH FREQUENCY PERFORMANCE; LOW TEMPERATURE MICROWAVES; MAXIMUM OSCILLATION FREQUENCY; MICROWAVE ANNEALING; POLY-SI TFTS; POLY-SI THIN-FILM TRANSISTORS; POLYCRYSTALLINE SILICON THIN FILM; RADIO FREQUENCIES;

THIN FILM TRANSISTORS;

EID: 84926061584     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2015.2399498     Document Type: Article

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