Submicron super TFTs for 3-D VLSI applications

IEEE Electron Device Letters

Volumn 21, Issue 9, 2000, Pages 391-393

  Wang, Hongmei ^a   Chan, Mansun ^a   Jagar, Singh ^a   Wang, Yangyuan ^b   Ko, Ping K ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^b PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN SIZE AND SHAPE; SEMICONDUCTING SILICON; THRESHOLD VOLTAGE; VLSI CIRCUITS;

GRAIN ENHANCEMENT METHOD; SUBMICRON SUPER-THIN FILM TRANSISTORS;

THIN FILM TRANSISTORS;

EID: 0034259591     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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