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Journal of Applied Physics

Volumn 116, Issue 10, 2014, Pages

One-step patterning of double tone high contrast and high refractive index inorganic spin-on resist

(3) Zanchetta, E a Della Giustina, G a Brusatin, G a

a Dipartimento di Ingegneria Meccanica Settore Materiali (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

OXIDE MINERALS; PHOTOCATALYTIC ACTIVITY; TEMPERATURE; TITANIUM DIOXIDE;

HIGH REFRACTIVE INDEX; LITHOGRAPHIC PROCESS; LOW TEMPERATURES; NEGATIVE TONE RESIST; PHOTO-CATALYTIC; PROCESS PARAMETERS; STRUCTURE EVOLUTION; TRANSFER PROCESS;

REFRACTIVE INDEX;

EID: 84924561660 PISSN: 00218979 EISSN: 10897550 Source Type: Journal
DOI: 10.1063/1.4893724 Document Type: Article

Times cited : (5)

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