SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 176-179

Highly inorganic titania based sol-gel as directly patternable resist for micro-and nano-structured surfaces

(6) Zanchetta, E a Auzelyte, V b Brugger, J b Savegnago, A V a Della Giustina, G a,b Brusatin, G a

a Industrial Engineering Department (Italy)

b EPFL (Switzerland)

Author keywords

Inorganic resist; Nanoimprint; Patterning; Sol gel; Titania

Indexed keywords

IRRADIATION; REFRACTIVE INDEX; SOL-GEL PROCESS; SOL-GELS;

HYDROLYSIS AND CONDENSATION; INORGANIC RESIST; MORPHOLOGICAL CHARACTERIZATION; NANO-IMPRINT; NANOSTRUCTURED SURFACE; PATTERNING; PHOTOCATALYTIC EFFECT; TITANIA;

TITANIUM DIOXIDE;

EID: 84865613237 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2012.07.043 Document Type: Article

Times cited : (16)

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