A protocol for improving fabrication yield of thin SU-8 microcantilevers for use in an aptasensor

Microsystem Technologies

Volumn 21, Issue 2, 2015, Pages 371-380

  Lim, Yang Choon ^a   Kouzani, Abbas Z ^a   Kaynak, Akif ^a   Dai, Xiujuan J ^a   Littlefair, Guy ^a   Duan, Wei ^a  

^a DEAKIN UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

BAKERIES; BIOCOMPATIBILITY; CHEMICAL EQUIPMENT; CHEMICAL SENSORS; ELECTROMECHANICAL DEVICES; MEMS; PHOTORESISTS; POLYMETHYL METHACRYLATES;

BAKING TEMPERATURE; FABRICATION YIELD; FLUOROCARBON FILMS; NEGATIVE PHOTORESISTS; SACRIFICIAL LAYER; SENSING APPLICATIONS; SILICON PROCESSING; STRUCTURE DEVELOPMENT;

FABRICATION;

EID: 84922337609     PISSN: 09467076     EISSN: 14321858     Source Type: Journal    
DOI: 10.1007/s00542-013-2019-1     Document Type: Article

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